Vacuum coating system comprising a transport unit for transporting substrates
STRUEMPFEL JOHANNES, HECHT HANSRISTIAN, BAUER REINHARDT, HUPKA FRANK, HEISIG ANDREAS, ERBKAMM WOLFGANG
Year of Publication 06.03.2012
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Year of Publication 06.03.2012
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Vacuum coating system comprising a transport unit for transporting substrates
Bauer, Reinhardt, Hupka, Frank, Heisig, Andreas, Struempfel, Johannes, Hecht, Hans-Christian, Erbkamm, Wolfgang
Year of Publication 06.03.2012
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Year of Publication 06.03.2012
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Heating device for a vacuum plant, comprises a heat-radiating surface, and a heat storage unit and/or heating element arranged parallel to the surface of the heat storage unit
HUPKA, FRANK, HEISIG, ANDREAS, BAUER, REINHARDT, PUENSCH, THOMAS, SMOLKE, MATTHIAS
Year of Publication 09.04.2009
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Year of Publication 09.04.2009
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Transport device with a monitoring appliance and substrate treatment apparatus
STRUEMPFEL JOHANNES, BAUER REINHARDT, HUPKA FRANK, POSSECKARDT THOMAS, HEISIG ANDREAS, SMOLKE MATTHIAS
Year of Publication 06.12.2011
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Year of Publication 06.12.2011
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Transport device with a monitoring appliance and substrate treatment apparatus
Bauer, Reinhardt, Struempfel, Johannes, Heisig, Andreas, Smolke, Matthias, Posseckardt, Thomas, Hupka, Frank
Year of Publication 06.12.2011
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Year of Publication 06.12.2011
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VACUUM COATING SYSTEM COMPRISING A TRANSPORT UNIT FOR TRANSPORTING SUBSTRATES
STRUEMPFEL JOHANNES, HECHT HANSRISTIAN, BAUER REINHARDT, HUPKA FRANK, HEISIG ANDREAS, ERBKAMM WOLFGANG
Year of Publication 09.07.2009
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Year of Publication 09.07.2009
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TRANSPORT DEVICE WITH A MONITORING APPLIANCE AND SUBSTRATE TREATMENT APPARATUS
STRUEMPFEL JOHANNES, BAUER REINHARDT, HUPKA FRANK, POSSECKARDT THOMAS, HEISIG ANDREAS, SMOLKE MATTHIAS
Year of Publication 15.01.2009
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Year of Publication 15.01.2009
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High temperature power connector for resistance heater utilized in e.g. diffusion furnace, has clamping pair and clamping connection made with same material and thickness, where thermal expansions of clamping pair and elements are equal
HUPKA, FRANK, MUCHAMEDJAROW, DAMIR, BAUER, REINHARDT, LESMANN, STEFFEN, SMOLKE, MATTHIAS
Year of Publication 24.02.2011
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Year of Publication 24.02.2011
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Vakuumbeschichtungsanlage mit einer Transporteinrichtung zum Transport von Substraten
HUPKA, FRANK, HEISIG, ANDREAS, STRUEMPFEL, JOHANNES, ERBKAMM, WOLFGANG, BAUER, REINHARDT, HECHT, HANSRISTIAN
Year of Publication 01.12.2011
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Year of Publication 01.12.2011
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Vakuumbeschichtungsanlage mit einer Transporteinrichtung zum Transport von Substraten
HUPKA, FRANK, HEISIG, ANDREAS, STRUEMPFEL, JOHANNES, ERBKAMM, WOLFGANG, BAUER, REINHARDT, HECHT, HANSRISTIAN
Year of Publication 01.10.2009
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Year of Publication 01.10.2009
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VACUUM COATING SYSTEM COMPRISING A TRANSPORT UNIT FOR TRANSPORTING SUBSTRATES
HUPKA, FRANK, HEISIG, ANDREAS, STRUEMPFEL, JOHANNES, ERBKAMM, WOLFGANG, BAUER, REINHARDT, HECHT, HANSRISTIAN
Year of Publication 22.05.2008
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Year of Publication 22.05.2008
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VACUUM COATING SYSTEM COMPRISING A TRANSPORT UNIT FOR TRANSPORTING SUBSTRATES
HUPKA, FRANK, HEISIG, ANDREAS, STRUEMPFEL, JOHANNES, ERBKAMM, WOLFGANG, BAUER, REINHARDT, HECHT, HANSRISTIAN
Year of Publication 10.01.2008
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Year of Publication 10.01.2008
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