PRECURSORS FOR SILICON DIOXIDE GAP FILL
ROEDER JEFFREY F, HUNKS WILLIAM, XU CHONGYING, BILODEAU STEVEN M, LI WEIMIN, HENDRIX BRYAN C
Year of Publication 13.04.2010
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Year of Publication 13.04.2010
Patent
Low Temperature Deposition of Ge Thin Films for Phase Change Memory
Chen, Tianniu, Xu, Chongying, Hunks, William, Stender, Matthias, Stauf, Gregory T., Chen, Philip S., Roeder, Jeffery F.
Published in ECS transactions (28.09.2007)
Published in ECS transactions (28.09.2007)
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Journal Article
Cobalt deposition selectivity on copper and dielectrics
Lieten, Ruben Remco, Chen, Philip S. H, Hunks, William, Lippy, Steven
Year of Publication 18.10.2022
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Year of Publication 18.10.2022
Patent
Precursors for silicon dioxide gap fill
Hendrix, Bryan C, Bilodeau, Steven M, Hunks, William, Xu, Chongying, Roeder, Jeffrey F, Li, Weimin
Year of Publication 07.08.2018
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Year of Publication 07.08.2018
Patent
PRECURSORS FOR SILICON DIOXIDE GAP FILL
Hendrix, Bryan C, Bilodeau, Steven M, Hunks, William, Xu, Chongying, Roeder, Jeffrey F, Li, Weimin
Year of Publication 10.05.2018
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Year of Publication 10.05.2018
Patent
COBALT DEPOSITION SELECTIVITY ON COPPER AND DIELECTRICS
LIPPY, STEVEN, CHEN, PHILIP, S.H, HUNKS, WILLIAM, LIETEN, RUBEN, REMCO
Year of Publication 17.03.2016
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Year of Publication 17.03.2016
Patent
Selective co growth on Cu for void-free via fill
Jun-Fei Zheng, Chen, Philip, Baum, Tomas H., Lieten, Ruben R., Hunks, William, Lippy, Steven, Frye, Asa, Weimin Li, O'Neill, James, Xu, Jeff, Zhu, John, Bao, Jerry, Machkaoutsan, Vladimir, Badaroglu, Mustafa, Yeap, Geoffrey, Murdoch, Gayle, Bommels, Jurgen, Tokei, Zsolt
Published in 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) (01.05.2015)
Published in 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) (01.05.2015)
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Conference Proceeding
AMINE CATALYSTS FOR LOW TEMPERATURE ALD/CVD SiO2 DEPOSITION USING HEXACHLORODISILANE/H2O
Hunks William, Li Yuqi, Hendrix Bryan C, DiMeo Susan V, Guo Dingkai, Li Weimin
Year of Publication 13.04.2017
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Year of Publication 13.04.2017
Patent
DOPING OF ZrO2 FOR DRAM APPLICATIONS
Hunks William, Cissell Julie, Xu Chongying, Cameron Thomas M, Peters David W
Year of Publication 24.11.2016
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Year of Publication 24.11.2016
Patent
Cobalt deposition selectivity on copper and dielectrics
LIPPY, STEVEN, HUNKS, WILLIAM, LIETEN, RUBEN REMCO, CHEN, PHILIP S. H
Year of Publication 11.10.2021
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Year of Publication 11.10.2021
Patent