Application of ANN for Fault Detection in Overhead Transport Systems for Semiconductor Fab
Zhakov, Artem, Zhu, Hailong, Siegel, Armin, Rank, Sebastian, Schmidt, Thorsten, Fienhold, Lars, Hummel, Stephan
Published in IEEE transactions on semiconductor manufacturing (01.08.2020)
Published in IEEE transactions on semiconductor manufacturing (01.08.2020)
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Journal Article
Automatic Fault Detection in Rails of Overhead Transport Systems for Semiconductor Fabs
Zhakov, Artem, Zhu, Hailong, Siegel, Armin, Rank, Sebastian, Schmidt, Thorsten, Fienhold, Lars, Hummel, Stephan
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
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Conference Proceeding
Trailer based rail monitoring in overhead hoist transport systems
Siegel, Armin, Zhakov, Artem, Zhu, Hailong, Schmidt, Thorsten, Hummel, Stephan, Fienhold, Lars
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
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Conference Proceeding