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Published in Journal of Photopolymer Science and Technology (16.12.2022)
Published in Journal of Photopolymer Science and Technology (16.12.2022)
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Journal Article
Advanced Development Techniques for Extreme-Tight Pitch Patterning
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Published in Journal of Photopolymer Science and Technology (25.06.2024)
Published in Journal of Photopolymer Science and Technology (25.06.2024)
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EUV 레지스트의 하이브리드 현상
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Year of Publication 30.04.2024
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높은 흐름과 높은 균일성을 가진 사용 시점 동적 집중 전달 시스템
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Year of Publication 10.12.2021
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HULI LIOR, DEVILLIERS ANTON J, FONSECA CARLOS A, HOOGE JOSHUA S, RATHSACK BENJAMEN, SMITH JEFFREY, KODAMA TERUHIKO
Year of Publication 10.06.2022
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Year of Publication 10.06.2022
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SUBSTRATE BACKSIDE TEXTURING
HULI LIOR, RATHSACK BENJAMEN M, FONSECA CARLOS A, SMITH JEFFREY T, DEVILLIERS ANTON
Year of Publication 13.04.2021
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Year of Publication 13.04.2021
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SUBSTRATE BACKSIDE TEXTURING
HULI LIOR, RATHSACK BENJAMEN M, FONSECA CARLOS A, SMITH JEFFREY T, DEVILLIERS ANTON
Year of Publication 13.04.2021
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Year of Publication 13.04.2021
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HIGH-PRECISION DISPENSE SYSTEM WITH MENISCUS CONTROL
HETZER DAVID, HULI LIOR, DEVILLIERS ANTON J, TRAVIS DAVID, GROOTEGOED JAMES, JACOBSON NORMAN A. JR, ROBISON RODNEY L, HOOGE JOSHUA S, NASMAN RONALD
Year of Publication 24.06.2022
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Year of Publication 24.06.2022
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HIGH-PURITY DISPENSE SYSTEM
HETZER DAVID, HULI LIOR, DEVILLIERS ANTON J, TRAVIS DAVID, GROOTEGOED JAMES, JACOBSON NORMAN A. JR, ROBISON RODNEY L, HOOGE JOSHUA S, NASMAN RONALD
Year of Publication 08.02.2022
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Year of Publication 08.02.2022
Patent