A SOI-RF-CMOS technology on high resistivity SIMOX substrates for microwave applications to 5 GHz
Eggert, D., Huebler, P., Huerrich, A., Kueck, H., Budde, W., Vorwerk, M.
Published in IEEE transactions on electron devices (01.11.1997)
Published in IEEE transactions on electron devices (01.11.1997)
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Journal Article
A Plasma Damage Mitigation Concept for SOI Technologies: Lightning Rods
Pelella, Mario M., Zhou, JR, Eppes, David, Leary, Mike, Hale, Stephen, Noorlag, Date, Bullard, Larry, Huebler, Peter, Schuler, Stefan, Dreizner, Andreas, Working, Jim, Chan, Darin, Schwan, Christoph, Horstmann, Manfred, En, Bill, Wieczorek, Karsten, Greenlaw, David, Heidel, Thomas, Heinig, Volker, Miethke, John, Kepler, Nick, Kruegel, Stephan, Frohberg, Kai, Rivers, Jason, Heller, Thomas, Richter, Ralf, Rodriguez, Norma, Klein, Rich
Published in 2007 IEEE International SOI Conference (01.10.2007)
Published in 2007 IEEE International SOI Conference (01.10.2007)
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Conference Proceeding