반도체 웨이퍼의 에지 영역의 복사 가열을 위한 장치들
HUBACEK JEROME S, TUCKER JEREMY TODD, ONG SENG, KANAKASABAPATHY SIVANANDA KRISHNAN
Year of Publication 11.04.2024
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Year of Publication 11.04.2024
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웨이퍼들에서 건식 현상 부산물들의 휘발을 위한 건식 현상 장치 및 방법들
HUBACEK JEROME S, PETER DANIEL, TAN SAMANTHA S.H, KANAKASABAPATHY SIVANANDA KRISHNAN
Year of Publication 16.02.2024
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Year of Publication 16.02.2024
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큰 표면들의 반사 푸리에 타이코그래피 (REFLECTIVE FOURIER PTYCHOGRAPHY) 이미징
HUBACEK JEROME S, ANDERSON COLLIN MICHAEL, MOSELY RODERICK, DRAEGER NERISSA SUE
Year of Publication 26.07.2022
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Year of Publication 26.07.2022
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APPARATUSES FOR RADIATIVE HEATING OF AN EDGE REGION OF A SEMICONDUCTOR WAFER
TUCKER, Jeremy Todd, HUBACEK, Jerome S, KANAKASABAPATHY, Sivananda Krishnan, ONG, Seng
Year of Publication 23.02.2023
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Year of Publication 23.02.2023
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REFLECTIVE FOURIER PTYCHOGRAPHY IMAGING OF LARGE SURFACES
Anderson, Collin Michael, Draeger, Nerissa Sue, Mosely, Roderick, Hubacek, Jerome S
Year of Publication 29.12.2022
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Year of Publication 29.12.2022
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ENDPOINT DETECTION AND TRACKING OF PHOTORESIST PROCESSES
TUCKER, Jeremy Todd, KC, Shambhu, HUBACEK, Jerome S, WISE, Richard, LUSHINGTON, Andrew Pratheep, STEVENS, Jason, WANG, Chen, MYERS, Michael Thomas, ROUX, Malcolm, VOLOSSKIY, Boris, ONG, Seng
Year of Publication 13.06.2024
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Year of Publication 13.06.2024
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PEDESTAL WITH SPIRAL VANES
HUBACEK, Jerome S, SOVANI, Yogesh Mahesh, LE GEAR, Conor, BEN-YUHMIN, Narudha Tai, TORBATISARRAF, Seyedalireza, CHALMERS, Jeffrey Michael, TRAKROO, Ujjwal Aashray
Year of Publication 06.06.2024
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Year of Publication 06.06.2024
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INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTERNING
Yu, Jengyi, Tan, Samantha S.H, Alvi, Mohammed Haroon, Weidman, Timothy William, Wise, Richard, Kanakasabapathy, Sivananda Krishnan, Hubacek, Jerome S, LaVoie, Adrien, Pan, Yang, Gottscho, Richard Alan, Lin, Qinghuang
Year of Publication 14.09.2023
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Year of Publication 14.09.2023
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INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTERNING
TAN, Samantha S.H, PAN, Yang, LAVOIE, Adrien, WISE, Richard, HUBACEK, Jerome S, LIN, Qinghuang, KANAKASABAPATHY, Sivananda Krishnan, YU, Jengyi, WEIDMAN, Timothy William, ALVI, Mohammed Haroon, GOTTSCHO, Richard Alan
Year of Publication 02.05.2024
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Year of Publication 02.05.2024
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REFLECTIVE FOURIER PTYCHOGRAPHY IMAGING OF LARGE SURFACES
ANDERSON, Collin Michael, DRAEGER, Nerissa Sue, MOSELY, Roderick, HUBACEK, Jerome S
Year of Publication 10.06.2021
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Year of Publication 10.06.2021
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INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTERNING
Yu, Jengyi, Tan, Samantha S.H, Alvi, Mohammed Haroon, Weidman, Timothy William, Wise, Richard, Kanakasabapathy, Sivananda Krishnan, Hubacek, Jerome S, LaVoie, Adrien, Pan, Yang, Gottscho, Richard Alan, Lin, Qinghuang
Year of Publication 09.02.2023
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Year of Publication 09.02.2023
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DRY CHAMBER CLEAN USING THERMAL AND PLASMA PROCESSES
TAN, Samantha S.H, KC, Shambhu, HUBACEK, Jerome S, WISE, Richard, STEVENS, Jason, YAMAGUCHI, Yoko, PETER, Daniel, JENSEN, Alan J, VOLOSSKIY, Boris, TUCKER, Jeremy Todd, LUSHINGTON, Andrew Pratheep, RAMALINGAM, Jothilingam, LABIB, Shahd Hassan, WANG, Chen, MYERS, Michael Thomas, WEIDMAN, Timothy William, ONG, Seng
Year of Publication 11.04.2024
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Year of Publication 11.04.2024
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Apparatuses for radiative heating of an edge region of a semiconductor wafer
ONG, SENG, HUBACEK, JEROME S, TUCKER, JEREMY TODD, KANAKASABAPATHY, SIVANANDA KRISHNAN
Year of Publication 01.05.2023
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Year of Publication 01.05.2023
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Reflective Fourier ptychography for large surfaces
HUBACEK, JEROME, S, ANDERSON COLIN MICHAEL, MOSLEY RODERICK, DRAGER, NILISHA, SUE
Year of Publication 13.09.2022
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Year of Publication 13.09.2022
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