Macroparticle-filtered coating plasma source device
HUANG SHANG-FENG, TSAI MING-RUESY, TSAI DING-GUEY, AI CHI-FONG, WEI SHIN-WU, WU JIN-YU
Year of Publication 08.05.2008
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Year of Publication 08.05.2008
Patent
Microparticles filtered coating plasma source apparatus
HUANG, SHANG-FENG, TSAI, DING-GUEI, WEI, SHIN-WU, TSAI, MING-RUEI, AI, CHI-FONG
Year of Publication 01.05.2008
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Year of Publication 01.05.2008
Patent