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Year of Publication 05.04.2024
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Substrate processing apparatus
CHA DONG-IL, LEE DONG-HO, HUANG LINGWU, LEE JUN-BUM, KIM SUON, NA KYUNG-HOON, SONG XIUJING, KANNAN, KIM KWAN-HEE
Year of Publication 31.05.2024
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Year of Publication 31.05.2024
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GAS EJECTOR AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
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Year of Publication 30.04.2024
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Year of Publication 30.04.2024
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Chamber supporting structure and substrate processing device
CHA DONG-IL, LEE DONG-HO, HUANG LINGWU, LEE JUN-BUM, KIM SUON, SONG XIUJING, KANNAN, KIM KWAN-HEE
Year of Publication 05.04.2024
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Year of Publication 05.04.2024
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Sequential exhaust control method for fuel cell
ZHANG XINYU, CAO JIUHE, HUANG LINGWU, SUN DAWEI, YU GUANGWEI, DU WENJIE
Year of Publication 28.12.2021
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Year of Publication 28.12.2021
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Heat dissipation structure of cover of chemical vapor deposition equipment and cover
CHA DONG-IL, CHA SE-WOOK, SONG XIUJING, KANNAN, WOO SANG-YOON, LEE DONG-HO, KIM NAM KYUNG, LI ZHE, HUANG LINGWU, LEE JUN-BUM, KIM SUON, PARK SANG WOO, KIM KWAN-HEE
Year of Publication 19.07.2024
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Year of Publication 19.07.2024
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Chamber protection device and chemical vapor deposition equipment
CHA DONG-IL, LI JIRONG, LEE DONG-HO, HUANG LINGWU, LEE JUN-BUM, KIM SUON, SONG XIUJING, YANG HEEUL, RYU SANG MAN, KANNAN, KIM KWAN-HEE, KIL HYUNGWOOK
Year of Publication 02.07.2024
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Year of Publication 02.07.2024
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Part separating device of wafer process chamber
CHA DONG-IL, LEE DONG-HO, LEE HO-JOON, HUANG LINGWU, LEE JUN-BUM, KIM KYEONG SOO, KIM SUON, SONG XIUJING, KANNAN, KIM KWAN-HEE, NA JAE-MOON
Year of Publication 28.06.2024
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Year of Publication 28.06.2024
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Pressure detection device and pressure detection method for chamber of semiconductor processing equipment
CHA DONG-IL, LEE DONG-HO, HUANG LINGWU, LEE JUN-BUM, KIM SUON, SONG XIUJING, HUANG YUNJING, KIM HYUNG-YUN, KIM SO-YOUNG, KIM YUN-HO, KANNAN, KIM KWAN-HEE
Year of Publication 11.06.2024
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Year of Publication 11.06.2024
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