Search Results - "HUANG Haigou" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

SiOC CMP developed and implemented in 7nm and beyond

SiOC CMP developed and implemented in 7nm and beyond

by Haigou Huang, Taifong Chao, Ja-Hyung Han, Koli, Dinesh, Qiang Fang
Published in 2017 China Semiconductor Technology International Conference (CSTIC) (01.03.2017)

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Conference Proceeding

The Role of Polysilicon Slurry and Its Application in 7nm CMP

The Role of Polysilicon Slurry and Its Application in 7nm CMP

by Chao, Tai Fong, Penigalapati, Dinesh, Yang, JI Chul, Huang, Haigou, Koli, Dinesh R
Published in ECS transactions (26.04.2017)

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Journal Article

CMP: Consideration of Stop-on Selectivity in Advanced Node Semiconductor Manufacturing Technology

CMP: Consideration of Stop-on Selectivity in Advanced Node Semiconductor Manufacturing Technology

by Tsai, Stan, Amanapu, Hari, Xie, Ruilong, Zhang, John, Chung, Kisup, Labelle, Cathy, Huang, Haigou, Han, Ja-Hyung, Koli, Dinesh R, Surisetty, Charan
Published in ECS transactions (25.04.2017)

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Journal Article

CMP Challenges for Advanced Technology Nodes

CMP Challenges for Advanced Technology Nodes

by Zhang, John H., Huang, Haigou, Greene, Andrew M., Xie, Ruilong, Seo, Soon-Cheon, Montanini, Pietro, Tseng, Wei-Tsu, Tsai, Stan, Malley, Matthew, Fang, Qiang, Patlolla, Raghuveer, Koli, Dinesh, Guo, Dechao, Canaperi, Donald F., Surisetty, Charan, Wynne, Jean E., Kleemeier, Walter, Labelle, Cathy
Published in MRS advances (01.01.2017)

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Journal Article

Semiconductor device with reduced gate height budget

Semiconductor device with reduced gate height budget

by Zang, Hui, Huang, Haigou
Year of Publication 07.09.2021

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Patent

SEMICONDUCTOR DEVICE WITH REDUCED GATE HEIGHT BUDGET

SEMICONDUCTOR DEVICE WITH REDUCED GATE HEIGHT BUDGET

by ZANG, Hui, Huang, Haigou
Year of Publication 05.12.2019

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Patent

Semiconductor device with reduced gate height budget

Semiconductor device with reduced gate height budget

by Zang, Hui, Huang, Haigou
Year of Publication 03.09.2019

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Patent

Vertical field-effect transistor having a dielectric spacer between a gate electrode edge and a self-aligned source/drain contact

Vertical field-effect transistor having a dielectric spacer between a gate electrode edge and a self-aligned source/drain contact

by Zang, Hui, Huang, Haigou
Year of Publication 19.02.2019

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Patent

IC product comprising a novel insulating gate separation structure for transistor devices

IC product comprising a novel insulating gate separation structure for transistor devices

by Wu, Xusheng, Gao, Jinsheng, Huang, Haigou
Year of Publication 31.05.2022

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Patent

Vertical Field-Effect Transistor having a Dielectric Spacer between a Gate Electrode Edge and a Self-Aligned Source/Drain Contact

Vertical Field-Effect Transistor having a Dielectric Spacer between a Gate Electrode Edge and a Self-Aligned Source/Drain Contact

by Zang, Hui, Huang, Haigou
Year of Publication 24.01.2019

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Patent

SEMICONDUCTOR DEVICE WITH REDUCED GATE HEIGHT BUDGET

SEMICONDUCTOR DEVICE WITH REDUCED GATE HEIGHT BUDGET

by ZANG, Hui, Huang, Haigou
Year of Publication 24.01.2019

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Patent

Methods, apparatus and system for gate cut process using a stress material in a finFET device

Methods, apparatus and system for gate cut process using a stress material in a finFET device

by Wu, Xusheng, Huang, Haigou
Year of Publication 08.01.2019

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Patent

METHODS OF FORMING INTEGRATED CIRCUIT STRUCTURES INCLUDING OPENING FILLED WITH INSULATOR IN METAL GATE

METHODS OF FORMING INTEGRATED CIRCUIT STRUCTURES INCLUDING OPENING FILLED WITH INSULATOR IN METAL GATE

by Zang, Hui, Huang, Haigou
Year of Publication 04.10.2018

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Patent

Methods of forming integrated circuit structures including opening filled with insulator in metal gate

Methods of forming integrated circuit structures including opening filled with insulator in metal gate

by Zang, Hui, Huang, Haigou
Year of Publication 02.10.2018

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Patent

Gap fill void and connection structures

Gap fill void and connection structures

by Ren, Yuping, Ackmann, Paul, Huang, Haigou, Ning, Guoxiang
Year of Publication 16.05.2023

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Patent

Methods for forming different shapes in different regions of the same layer

Methods for forming different shapes in different regions of the same layer

by Gao Jinsheng, Huang Haigou
Year of Publication 03.04.2018

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Patent

Devices and methods of improving device performance through gate cut last process

Devices and methods of improving device performance through gate cut last process

by Huang Haigou, Wu Xusheng
Year of Publication 13.06.2017

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Patent

Methods, apparatus, and system for forming epitaxial formations with reduced risk of merging

Methods, apparatus, and system for forming epitaxial formations with reduced risk of merging

by Gao, Qun, Huang, Haigou, Stoker, Matthew W
Year of Publication 07.01.2020

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Patent

IC PRODUCT COMPRISING A NOVEL INSULATING GATE SEPARATION STRUCTURE FOR TRANSISTOR DEVICES

IC PRODUCT COMPRISING A NOVEL INSULATING GATE SEPARATION STRUCTURE FOR TRANSISTOR DEVICES

by Wu, Xusheng, Gao, Jinsheng, Huang, Haigou
Year of Publication 12.12.2019

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Patent

Methods of forming replacement gate structures on transistor devices

Methods of forming replacement gate structures on transistor devices

by Wu, Xusheng, Gao, Jinsheng, Huang, Haigou
Year of Publication 19.11.2019

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Patent

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