The Role of Polysilicon Slurry and Its Application in 7nm CMP
Chao, Tai Fong, Penigalapati, Dinesh, Yang, JI Chul, Huang, Haigou, Koli, Dinesh R
Published in Meeting abstracts (Electrochemical Society) (15.04.2017)
Published in Meeting abstracts (Electrochemical Society) (15.04.2017)
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Journal Article
Multi-step insulator formation in trenches to avoid seams in insulators
Chang, Chih-Chiang, Cao, Huy, Liu, Jinping, Huang, Haigou, Sirman, Asli, Shu, Jiehui
Year of Publication 30.03.2021
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Year of Publication 30.03.2021
Patent
New CMP processes development and challenges for 7nm and beyond
Huang, Haigou, Koli, Dinesh, Zhang, John H, Tsai, Stan, Chao, Taifong, Lu, Yuanfang, Kim, Hong Jin, Fang, Qiang, Lu, Wenyin
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
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Conference Proceeding
Cap structure
Chang, Chih-Chiang, Rutkowski, Mitchell, Hong, Junsic, Cao, Huy, Gao, Jinsheng, Jaeger, Daniel, Carpenter, Patrick, Huang, Haigou, Aquilino, Michael
Year of Publication 23.02.2021
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Year of Publication 23.02.2021
Patent
Contact structures
Wu, Xusheng, Zhang, John H, Huang, Haigou, Economikos, Laertis, Shu, Jiehui, Liu, Pei
Year of Publication 17.12.2019
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Year of Publication 17.12.2019
Patent
MULTI-STEP INSULATOR FORMATION IN TRENCHES TO AVOID SEAMS IN INSULATORS
Chang, Chih-Chiang, Cao, Huy, Liu, Jinping, Huang, Haigou, Sirman, Asli, Shu, Jiehui
Year of Publication 21.11.2019
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Year of Publication 21.11.2019
Patent
MULTI-STEP INSULATOR FORMATION IN TRENCHES TO AVOID SEAMS IN INSULATORS
Chang, Chih-Chiang, Cao, Huy, Liu, Jinping, Huang, Haigou, Sirman, Asli, Shu, Jiehui
Year of Publication 03.10.2019
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Year of Publication 03.10.2019
Patent
Multi-step insulator formation in trenches to avoid seams in insulators
Chang, Chih-Chiang, Cao, Huy, Liu, Jinping, Huang, Haigou, Sirman, Asli, Shu, Jiehui
Year of Publication 01.10.2019
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Year of Publication 01.10.2019
Patent
Methods, apparatus, and system for a semiconductor device comprising gates with short heights
Zang, Hui, Liu, Jinping, Huang, Haigou, Shu, Jiehui, Derderian, Garo Jacques, Zhang, John
Year of Publication 17.09.2019
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Year of Publication 17.09.2019
Patent