Synchrotron Radiation X-ray Diffraction and X-ray Photoelectron Spectroscopy Investigation on Si-based Structures for Sub-Micron Si-IC Applications
Zhe Chuan Feng, Li-Chi Cheng, Chu-Wan Huang, Ying-Lang Wang, Yang, T.R.
Published in 2006 IEEE International Conference on Semiconductor Electronics (01.11.2006)
Published in 2006 IEEE International Conference on Semiconductor Electronics (01.11.2006)
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