Monolithic two-directional inclination sensor and manufacturing method thereof
KO, GREEN RUI-LING, LIAO, CHUN-YI, HUANG, BRIAN BO-LIN, PAN, SHINIUAN, CHEN, TIM YAN-TONG, JHENG, CINDY SHI-YING
Year of Publication 01.12.2023
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Year of Publication 01.12.2023
Patent