POLYSILICON REMOVAL IN WORD LINE CONTACT REGION OF MEMORY DEVICES
LEE CHIH MING, YEH SU YU, LIAO KENG YING, WU YEN JOU, LIN H.H, HSIEH PING PANG, WANG Y.L
Year of Publication 06.01.2022
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Year of Publication 06.01.2022
Patent
Polysilicon removal in word line contact region of memory devices
Lee, Chih-Ming, Wu, Yen-Jou, Yeh, Su-Yu, Hsieh, Ping-Pang, Liao, Keng-Ying, Wang, Yu-Liang, Lin, Hsin-Hui
Year of Publication 16.07.2024
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Year of Publication 16.07.2024
Patent
Polysilicon Removal In Word Line Contact Region Of Memory Devices
Lee, Chih-Ming, Yeh, Su-Yu, Hsieh, Ping-Pang, WU, Yen-Jou, Liao, Keng-Ying, Wang, Yu-Liang, Lin, Hsin-Hui
Year of Publication 30.11.2023
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Year of Publication 30.11.2023
Patent
Polysilicon removal in word line contact region of memory devices
Lee, Chih-Ming, Wu, Yen-Jou, Yeh, Su-Yu, Hsieh, Ping-Pang, Liao, Keng-Ying, Wang, Yu-Liang, Lin, Hsin-Hui
Year of Publication 13.12.2022
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Year of Publication 13.12.2022
Patent
POLYSILICON REMOVAL IN WORD LINE CONTACT REGION OF MEMORY DEVICES
LIAO, Keng-Ying, LEE, Chih-Ming, WANG, Y.L, LIN, H.H, Hsieh, Ping-Pang, WU, Y.J, YEH, Su-Yu
Year of Publication 30.12.2021
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Year of Publication 30.12.2021
Patent
POLYSILICON REMOVAL IN WORD LINE CONTACT REGION OF MEMORY DEVICES
WANG, Yu-Liang, LIAO, Keng-Ying, LIN, Hsin-Hui, LEE, Chih-Ming, Hsieh, Ping-Pang, WU, Yen-Jou, YEH, Su-Yu
Year of Publication 17.11.2022
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Year of Publication 17.11.2022
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