Effect of interfacial fluorination on the electrical properties of the inter-poly high- k dielectrics
Hsieh, Chih-Ren, Chen, Yung-Yu, Lu, Kwung-Wen, Lin, Gray, Lou, Jen-Chung
Published in Microelectronic engineering (01.06.2011)
Published in Microelectronic engineering (01.06.2011)
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Journal Article
SEMICONDUCTOR MEMORY DEVICE HAVING COMPOSITE DIELECTRIC FILM STRUCTURE AND METHODS OF FORMING THE SAME
WANG WEI-MING, HSIEH CHIH-REN, CHEN SHENGIEH, LIU MING CHYI, LEE MING-LUN
Year of Publication 29.07.2024
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Year of Publication 29.07.2024
Patent
Characteristics of the Fluorinated High- k Inter-Poly Dielectrics
Chih-Ren Hsieh, Yung-Yu Chen, Kwung-Wen Lu, Lin, G, Jen-Chung Lou
Published in IEEE electron device letters (01.12.2010)
Published in IEEE electron device letters (01.12.2010)
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Journal Article
SEMICONDUCTOR ELEMENT AND METHOD OF MANUFACTURING THE SAME
WANG WEI-MING, HSIEH CHIH-REN, LIU MINGYI, CHEN SHENGIEH, LEE MING-LUN
Year of Publication 02.09.2022
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Year of Publication 02.09.2022
Patent
SEMICONDUCTOR MEMORY DEVICE HAVING COMPOSITE DIELECTRIC FILM STRUCTURE AND METHODS OF FORMING THE SAME
WANG WEI MING, HSIEH CHIH REN, CHEN SHENG CHIEH, LEE MING LUN, LIU MING CHYI
Year of Publication 30.08.2022
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Year of Publication 30.08.2022
Patent
CELL-LIKE FLOATING-GATE TEST STRUCTURE
LIU CHEN CHIN, LIN MENG HAN, HUANG CHIH PIN, HSIEH CHIH REN, KAO YA CHEN
Year of Publication 28.03.2019
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Year of Publication 28.03.2019
Patent
Reliability improvement of HfO2/SiON gate stacked nMOSFET using fluorinated silicate glass passivation layer
Chih-Ren Hsieh, Yung-Yu Chen, Jer-Fu Chung, Jen-Chung Lou
Published in 2009 IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC) (01.12.2009)
Published in 2009 IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC) (01.12.2009)
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Conference Proceeding