High power multiple frequency coupling generator and driving method thereof
TENG, HUNG-YI, CHIU, CHIHUNG, LIAO, CHIUNG, HSIEH, SHOUUNG, CHEN, KE-HORNG, JHOU, YAN-FU
Year of Publication 16.03.2024
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Year of Publication 16.03.2024
Patent
High power multiple frequency coupling generator and driving method thereof
TENG, HUNG-YI, CHIU, CHIHUNG, LIAO, CHIUNG, HSIEH, SHOUUNG, CHEN, KE-HORNG, JHOU, YAN-FU
Year of Publication 11.07.2023
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Year of Publication 11.07.2023
Patent