Self-removal anti-stiction coating for bonding process
Liu Ping-Yin, Chao Lan-Lin, Tsai Shang-Ying, Lin Hung-Hua, Chu Li-Cheng, Tsai Chia-Shiung, Hsieh Yuan-Chih, Cheng Chun-Wen, Peng Jung-Huei
Year of Publication 04.04.2017
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Year of Publication 04.04.2017
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Integrate Rinse Module in Hybrid Bonding Platform
Liu Ping-Yin, Chao Lan-Lin, Lin Hung-Hua, Kuang Hsun-Chung, Tsai Chia-Shiung, Chen Xiaomeng, Hsieh Yuan-Chih, Huang Xin-Hua
Year of Publication 05.01.2017
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Year of Publication 05.01.2017
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MEMS structures and methods for forming the same
Liu Ping-Yin, Chao Lan-Lin, Huang Hsin-Ting, Tsai Chia-Shiung, Hsieh Yuan-Chih, Cheng Chun-Wen, Huang Xin-Hua, Peng Jung-Huei
Year of Publication 03.01.2017
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Year of Publication 03.01.2017
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