Real-time curling probe monitoring of dielectric layer deposited on plasma chamber wall
Hotta, Masaya, Ogawa, Daisuke, Nakamura, Keiji, Sugai, Hideo
Published in Japanese Journal of Applied Physics (01.04.2018)
Published in Japanese Journal of Applied Physics (01.04.2018)
Get full text
Journal Article
MULTI-LEAF SPRING TYPE DAMPING DEVICE
NAGASAKA, MASAHIKO, AOKI, TOMOHIRO, HOTTA, MASAYA, ISHIGURO, HIROHIDE, MORIMITSU, HIDEKI
Year of Publication 19.07.2007
Get full text
Year of Publication 19.07.2007
Patent
MOLDING PROCESS AND MOLDS MADE BY THE PROCESS
ASANO, NORIHIRO, ZENPO, TOSHIHIKO, NISHIKAWA, KAZUYUKI, HOTTA, MASAYA
Year of Publication 12.01.2006
Get full text
Year of Publication 12.01.2006
Patent