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Year of Publication 20.02.2024
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Year of Publication 20.02.2024
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코팅 트랙 내로의 센서 기술 통합
ENOMOTO MASASHI, TADOKORO MASAHIDE, SHIBA KAZUHIRO, CARCASI MICHAEL, HOOGE JOSHUA
Year of Publication 23.10.2023
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Year of Publication 23.10.2023
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배스 시스템 및 이의 방법
MARUMOTO HIROSHI, ESTRELLA JOEL, SIMMS IHSAN, ROTONDARO ANTONIO LUIS PACHECO, CARCASI MICHAEL, HOOGE JOSHUA
Year of Publication 13.02.2024
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Year of Publication 13.02.2024
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기판 처리를 하는 동안 스핀 공정 비디오 분석을 위한 시스템 및 방법
ENOMOTO MASASHI, ESTRELLA JOEL, TADOKORO MASAHIDE, CARCASI MICHAEL, SOMERVELL MARK, IWAKI HIROYUKI, HOOGE JOSHUA, KUNUGIMOTO YUICHIRO
Year of Publication 11.07.2022
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Year of Publication 11.07.2022
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METHODS AND TECHNIQUES TO USE WITH PHOTOSENSITIZED CHEMICALLY AMPLIFIED RESIST CHEMICALS AND PROCESSES
RATHSACK BENJAMEN M, NAGAHARA SEIJI, HOOGE JOSHUA S, CARCASI MICHAEL A
Year of Publication 08.06.2022
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Year of Publication 08.06.2022
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SUBSTRATE BACKSIDE TEXTURING
HULI LIOR, DEVILLIERS ANTON J, FONSECA CARLOS A, HOOGE JOSHUA S, RATHSACK BENJAMEN, SMITH JEFFREY, KODAMA TERUHIKO
Year of Publication 10.06.2022
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Year of Publication 10.06.2022
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HIGH-PRECISION DISPENSE SYSTEM WITH MENISCUS CONTROL
HETZER DAVID, HULI LIOR, DEVILLIERS ANTON J, TRAVIS DAVID, GROOTEGOED JAMES, JACOBSON NORMAN A. JR, ROBISON RODNEY L, HOOGE JOSHUA S, NASMAN RONALD
Year of Publication 24.06.2022
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Year of Publication 24.06.2022
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HIGH-PURITY DISPENSE SYSTEM
HETZER DAVID, HULI LIOR, DEVILLIERS ANTON J, TRAVIS DAVID, GROOTEGOED JAMES, JACOBSON NORMAN A. JR, ROBISON RODNEY L, HOOGE JOSHUA S, NASMAN RONALD
Year of Publication 08.02.2022
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Year of Publication 08.02.2022
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Modeling of Copper Hybrid Bonding Anneal
Hooge, Joshua, Jois, Chetan, Netzband, Christopher, Son, Ilseok
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28.05.2024)
Published in 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) (28.05.2024)
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Conference Proceeding
기판 배면 텍스처링
HULI LIOR, DEVILLIERS ANTON J, FONSECA CARLOS A, HOOGE JOSHUA S, RATHSACK BENJAMEN, SMITH JEFFREY, KODAMA TERUHIKO
Year of Publication 25.04.2018
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Year of Publication 25.04.2018
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스핀-온-카본 평탄화 기술
RATHSACK BENJAMEN M, SOMERVELL MARK H, BROWN IAN J, PRINTZ WALLACE P, HOOGE JOSHUA S, CARCASI MICHAEL A
Year of Publication 12.01.2018
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Year of Publication 12.01.2018
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