Methods and Techniques to use with Photosensitized Chemically Amplified Resist Chemicals and Processes
RATHSACK BENJAMEN M, NAGAHARA SEIJI, HOOGE JOSHUA S, CARCASI MICHAEL A
Year of Publication 27.08.2015
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Year of Publication 27.08.2015
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LINE PATTERN COLLAPSE MITIGATION THROUGH GAP-FILL MATERIAL APPLICATION
SCHEER STEVEN, RATHSACK BENJAMEN M, SOMERVELL MARK H, BROWN IAN J, HOOGE JOSHUA S
Year of Publication 07.05.2015
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Year of Publication 07.05.2015
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High-precision dispense system with meniscus control
ROBISON, RODNEY L, NASMAN, RONALD, HETZER, DAVID, GROOTEGOED, JAMES, JACOBSON, NORMAN A. JR, DEVILLIERS, ANTON J, HULI, LIOR, TRAVIS, DAVID, HOOGE, JOSHUA
Year of Publication 11.04.2022
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Year of Publication 11.04.2022
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SUBSTRATE BACKSIDE TEXTURING
HULI LIOR, RATHSACK BENJAMEN M, DEVILLIERS ANTON J, FONSECA CARLOS A, HOOGE JOSHUA S, SMITH JEFFREY, KODAMA TERUHIKO
Year of Publication 11.02.2016
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Year of Publication 11.02.2016
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COVER PLATE FOR WIND MARK CONTROL IN SPIN COATING PROCESS
ICHINO KATSUNORI, PRINTZ WALLACE P, HOOGE JOSHUA S, YOSHIHARA KOUSUKE, BASSETT DEREK W, TERASHITA YUICHI
Year of Publication 21.08.2014
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Year of Publication 21.08.2014
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Line pattern collapse mitigation through gap-fill material application
SCHEER STEVEN, RATHSACK BENJAMEN M, SOMERVELL MARK H, BROWN IAN J, HOOGE JOSHUA
Year of Publication 05.08.2014
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Year of Publication 05.08.2014
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High-purity dispense system
ROBISON, RODNEY L, NASMAN, RONALD, HETZER, DAVID, GROOTEGOED, JAMES, JACOBSON, NORMAN A. JR, DEVILLIERS, ANTON J, HULI, LIOR, HOOGE, JOSHUA S, TRAVIS, DAVID
Year of Publication 01.04.2021
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Year of Publication 01.04.2021
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Spin coating apparatus and method for manufacturing semiconductor device
TERASHITA, YUICHI, ICHINO, KATSUNORI, YOSHIHARA, KOUSUKE, PRINTZ, WALLACE P, HOOGE, JOSHUA S, BASSETT, DEREK W
Year of Publication 11.08.2017
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Year of Publication 11.08.2017
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LINE PATTERN COLLAPSE MITIGATION THROUGH GAP-FILL MATERIAL APPLICATION
SCHEER STEVEN, RATHSACK BENJAMEN M, SOMERVELL MARK H, BROWN IAN J, HOOGE JOSHUA
Year of Publication 25.08.2011
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Year of Publication 25.08.2011
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Substrate backside texturing
HULI LIOR, DEVILLIERS ANTON J, FONSECA CARLOS A, HOOGE JOSHUA S, RATHSACK BENJAMEN, SMITH JEFFREY, KODAMA TERUHIKO
Year of Publication 08.06.2018
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Year of Publication 08.06.2018
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Techniques for Spin-on-Carbon Planarization
RATHSACK BENJAMEN M, SOMERVELL MARK H, BROWN IAN J, PRINTZ WALLACE P, HOOGE JOSHUA S, CARCASI MICHAEL A
Year of Publication 16.02.2018
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Year of Publication 16.02.2018
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Techniques for spin-on-carbon planarization
BROWN, IAN J, SOMERVELL, MARK H, PRINTZ, WALLACE P, HOOGE, JOSHUA S, RATHSACK, BENJAMEN M, CARCASI, MICHAEL A
Year of Publication 11.12.2017
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Year of Publication 11.12.2017
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Cover plate for defect control in spin coating
ICHINO KATSUNORI, PRINTZ WALLACE P, HOOGE JOSHUA S, YOSHIHARA KOUSUKE, BASSETT DEREK W, TERASHITA YUICHI
Year of Publication 16.11.2016
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Year of Publication 16.11.2016
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