High-purity metal and metal silicide target for LSI electrodes
KUROKI; MASAMI, KYONO; IWAO, MORI; NOBUYUKI, KATOH; YOSHIHARU, MIYAZAKI; HIDEO, OIKAWA; HIDEO, AMAZAWA; TAKAO, HONNA; NAKAHACHIRO
Year of Publication 13.09.1988
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Year of Publication 13.09.1988
Patent