Trench oxide isolated single crystal silicon micromachined accelerometer
Sridhar, U., Lau Choon How, Liu Lian Jun, Miao Yu Bo, Tan Khen-Sang, Foo Pang Dow, Bergstrom, J., Sooriakumar, K., Loh Yong Hong, Lee Han San, Tan Chung Kiat
Published in International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) (1998)
Published in International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217) (1998)
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Conference Proceeding
ISOLATION PROCESS FOR SURFACE MICROMACHINED SENSORS AND ACTUATORS
LOH YONG HONG, LIU LIAN JUN, MIAO YU BO, UPPILI SRIDHAR, FOO PANG DOW
Year of Publication 18.09.2001
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Year of Publication 18.09.2001
Patent
Isolation process for surface micromachined sensors and actuators
JUN LIU LIAN, DOW FOO PANG, BO MAIO YU, SRIDHAR UPPILI, HONG LOH YONG
Year of Publication 16.11.1999
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Year of Publication 16.11.1999
Patent