Ion beam technologies for the 20nm technology node, 450mm wafer processes, and beyond
Jiong Chen, Junhua Hong, Jin Zhang, Boeker, Jeff
Published in 2014 International Workshop on Junction Technology (IWJT) (01.05.2014)
Published in 2014 International Workshop on Junction Technology (IWJT) (01.05.2014)
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Conference Proceeding
실리콘 웨이퍼 이송 장치
HONG JUNHUA, JEFF BOEKER, ZHANG CHANGYONG, CHEN JIONG, WANG ZHANZHU, XIA SHIWEI
Year of Publication 19.12.2022
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Year of Publication 19.12.2022
Patent
FinFET doping with PSG/BSG glass mimic doping by ultra low energy ion implantation
Chuan He, Lin Chen, Zhang, David Wei, Junhua Hong, Guangyao Jin, Jin Zhang, Boeker, Jeff, Renjie Liu, Hao Jin, Yimin Lv, Jiong Chen
Published in 2016 16th International Workshop on Junction Technology (IWJT) (01.05.2016)
Published in 2016 16th International Workshop on Junction Technology (IWJT) (01.05.2016)
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Conference Proceeding
Ion implant technology for state-of-the-art high efficiency solar cell applications
Guangyao Jin, Yaojie Sun, Yizhe Wang, Zhang, David Wei, Lin Chen, Chuan He, Boeker, Jeff, Junhua Hong, Shoujun Chen, Renjie Liu, Yimin Lv, Jiong Chen
Published in 2016 16th International Workshop on Junction Technology (IWJT) (01.05.2016)
Published in 2016 16th International Workshop on Junction Technology (IWJT) (01.05.2016)
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Conference Proceeding
Changes of coenzyme F420 under different organic loading rate in single-phase reactor of anaerobic digestion for food waste
Xuya Peng, Lu Wang, Chuanxing Jia, Yucui Di, Bing Mei, Junhua Hong
Published in World Automation Congress 2012 (01.06.2012)
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Published in World Automation Congress 2012 (01.06.2012)
Conference Proceeding