Model-based defect detection in multidimensional vector spaces
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Published in Electronics and communications in Japan (01.09.2012)
Published in Electronics and communications in Japan (01.09.2012)
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Development of pupil divided optics with magnification correction for high NA oblique imaging
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Published in Japanese Journal of Applied Physics (01.12.2022)
Published in Japanese Journal of Applied Physics (01.12.2022)
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A fast iterative technique for restoring scanning electron microscope images
Nakahira, Kenji, Miyamoto, Atsushi, Honda, Toshifumi
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (21.12.2014)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (21.12.2014)
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