Demonstration of Modulatable Nanophotonics based on modulatable optical near-field interactions between dispersed quantum dots
Tate, N., Nomura, W., Naruse, M., Kawazoe, T., Yatsui, T., Hoga, M., Ohyagi, Y., Sekine, Y., Fujita, H., Ohtsu, M.
Published in 2011 ICO International Conference on Information Photonics (01.05.2011)
Published in 2011 ICO International Conference on Information Photonics (01.05.2011)
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Conference Proceeding
The requirements for future electron-beam reticle fabrication systems from an error analysis viewpoint
MATSUZAKA, T, OHTA, H, SAITOU, N, KAWASAKI, K, KOHNO, T, HOGA, M
Published in Japanese Journal of Applied Physics (01.12.1993)
Published in Japanese Journal of Applied Physics (01.12.1993)
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Conference Proceeding
Journal Article
Stitching error analysis in an electron beam lithography system : column vibration effect
OHTA, H, MATSUZAKA, T, SAITOU, N, KAWASAKI, K, KOHNO, T, HOGA, M
Published in JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE REV PAP (01.12.1993)
Published in JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE REV PAP (01.12.1993)
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Conference Proceeding
Journal Article
Error Analysis in Electron Beam Lithography System -Thermal Effects on Positioning Accuracy
Ohta, Hiroya, Matsuzaka, Takashi, Saitou, Norio, Kawasaki, Katsuhiro, Nakamura, Kazumitsu, Kohno, Toshihiko, Hoga, Morihisa
Published in Japanese Journal of Applied Physics (01.12.1992)
Published in Japanese Journal of Applied Physics (01.12.1992)
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Journal Article