Collimated deposition apparatus and method
HELMER, JOHN C, PARK, YOUNG HOON, DEMARAY, RICHARD ERNEST, HOFFMAN, VANCE EBER JR, COCHRAN, RONALD R
Year of Publication 18.03.1998
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Year of Publication 18.03.1998
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COLLIMATED DEPOSITION APPARATUS AND METHOD
HELMER, JOHN C, PARK, YOUNG HOON, DEMARAY, RICHARD ERNEST, HOFFMAN, VANCE EBER JR, COCHRAN, RONALD R
Year of Publication 29.01.1992
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Year of Publication 29.01.1992
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Collimated deposition apparatus and method
HELMER, JOHN C, PARK, YOUNG HOON, DEMARAY, RICHARD ERNEST, HOFFMAN, VANCE EBER JR, COCHRAN, RONALD R
Year of Publication 07.08.1991
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Year of Publication 07.08.1991
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ROTATING SPUTTERING APPARATUS FOR SELECTED EROSION
HELMER, JOHN C, PARK, YOUNG HOON, DEMARAY, RICHARD ERNEST, ANDERSON, ROBERT L, HOFFMAN, VANCE EBER JR, COCHRAN, RONALD R
Year of Publication 15.01.1992
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Year of Publication 15.01.1992
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Rotating sputtering apparatus for selected erosion
HELMER, JOHN C, PARK, YOUNG HOON, DEMARAY, RICHARD ERNEST, ANDERSON, ROBERT L, HOFFMAN, VANCE EBER JR, COCHRAN, RONALD R
Year of Publication 31.07.1991
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Year of Publication 31.07.1991
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Gerät und Verfahren zur Niederschlagung durch einen Kollimator
HOFFMAN, VANCE EBER JR, LOS ALTOS, CALIFORNIA 94022, US, HELMER, JOHN C, MENLO PARK, CALIFORNIA 94028, US, PARK, YOUNG HOON, SAN RAMON, CALIFORNIA 94583, US, COCHRAN, RONALD R, MOUNTAIN VIEW, CALIFORNIA 94043, US, DEMARAY, RICHARD ERNEST, OAKLAND, CALIFORNIA 94608, US
Year of Publication 02.07.1998
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Year of Publication 02.07.1998
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