Method for controlling a collimated sputtering source
HIGA, STEPHEN M, MILLER, PATRICK O, PATTERSON, PAMELA R, ACTOR, GERI M, HOFFMAN, VANCE E., JR
Year of Publication 31.07.1996
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Year of Publication 31.07.1996
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Method for controlling a collimated sputtering source
HIGA, STEPHEN M, MILLER, PATRICK O, PATTERSON, PAMELA R, ACTOR, GERI M, HOFFMAN, VANCE E., JR
Year of Publication 29.03.1995
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Year of Publication 29.03.1995
Patent
Verfahren zur Steuerung einer kollimierten Sputterquelle
PATTERSON, PAMELA R., MOUNTAIN VIEW, CALIFORNIA 94040, US, ACTOR, GERI M., MONTE SERENO, CALIFORNIA 95030, US, HIGA, STEPHEN M., SAN JOSE, CALIFORNIA 95136, US, HOFFMAN, VANCE E., JR., LOS ALTOS, CALIFORNIA 94022, US, MILLER, PATRICK O., MOUNTAIN VIEW, CALIFORNIA 94040, US
Year of Publication 16.01.1997
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Year of Publication 16.01.1997
Patent
Method for controlling a collimated sputtering source
HIGA; STEPHEN M, HOFFMAN, JR.; VANCE E, PATTERSON; PAMELA R, MILLER; PATRICK O, ACTOR; GERI M
Year of Publication 26.12.1995
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Year of Publication 26.12.1995
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Rotating sputtering apparatus for selected erosion
COCHRAN; RONALD R, PARK; YOUNG H, HOFFMAN, JR.; VANCE E, HELMER; JOHN C, DEMARAY; RICHARD E, ANDERSON; ROBERT L
Year of Publication 12.10.1993
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Year of Publication 12.10.1993
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