기판 취급 시스템들
HOEY GEE SUN, JAGANATHAN BALASUBRAMANIAM COIMBATORE, RANGARAJAN JAGAN
Year of Publication 02.09.2022
Get full text
Year of Publication 02.09.2022
Patent
기판 상의 균일한 액체 유동 분배를 위한 스프레이 바 설계
MIKHAYLICHENKO EKATERINA, STOMBERG JAIMIE, HOEY GEE SUN, RANGARAJAN JAGAN
Year of Publication 09.08.2019
Get full text
Year of Publication 09.08.2019
Patent
Substrate handling systems
Hoey, Gee Sun, Jaganathan, Balasubramaniam Coimbatore, Rangarajan, Jagan
Year of Publication 18.07.2023
Get full text
Year of Publication 18.07.2023
Patent
SUBSTRATE HANDLING SYSTEMS
JAGANATHAN, Balasubramaniam Coimbatore, HOEY, Gee Sun, RANGARAJAN, Jagan
Year of Publication 13.01.2022
Get full text
Year of Publication 13.01.2022
Patent
SUBSTRATE HANDLING SYSTEMS
JAGANATHAN, Balasubramaniam Coimbatore, HOEY, Gee Sun, RANGARAJAN, Jagan
Year of Publication 13.01.2022
Get full text
Year of Publication 13.01.2022
Patent
Spray bar design for uniform liquid flow distribution on a substrate
Mikhaylichenko, Ekaterina, Hoey, Gee Sun, Rangarajan, Jagan, Stomberg, Jaimie
Year of Publication 25.08.2020
Get full text
Year of Publication 25.08.2020
Patent
Substrate handling systems
JAGANATHAN, BALASUBRAMANIAM COIMBATORE, HOEY, GEE SUN, RANGARAJAN, JAGAN
Year of Publication 21.05.2024
Get full text
Year of Publication 21.05.2024
Patent
SPRAY BAR DESIGN FOR UNIFORM LIQUID FLOW DISTRIBUTION ON A SUBSTRATE
MIKHAYLICHENKO, Ekaterina, HOEY, Gee Sun, RANGARAJAN, Jagan, STOMBERG, Jaimie
Year of Publication 05.07.2018
Get full text
Year of Publication 05.07.2018
Patent
SPRAY BAR DESIGN FOR UNIFORM LIQUID FLOW DISTRIBUTION ON A SUBSTRATE
MIKHAYLICHENKO, Ekaterina, HOEY, Gee Sun, RANGARAJAN, Jagan, STOMBERG, Jaimie
Year of Publication 05.07.2018
Get full text
Year of Publication 05.07.2018
Patent
Substrate handling systems
JAGANATHAN, BALASUBRAMANIAM COIMBATORE, HOEY, GEE SUN, RANGARAJAN, JAGAN
Year of Publication 01.05.2022
Get full text
Year of Publication 01.05.2022
Patent
SPRAY BAR DESIGN FOR UNIFORM LIQUID FLOW DISTRIBUTION ON A SUBSTRATE
MIKHAYLICHENKO EKATERINA, STOMBERG JAIMIE, HOEY GEE SUN, RANGARAJAN JAGAN
Year of Publication 13.08.2019
Get full text
Year of Publication 13.08.2019
Patent
Spray bar design for uniform liquid flow distribution on a substrate
STOMBERG, JAIMIE, MIKHAYLICHENKO, EKATERINA, HOEY, GEE SUN, RANGARAJAN, JAGAN
Year of Publication 16.08.2018
Get full text
Year of Publication 16.08.2018
Patent