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Year of Publication 02.03.2011
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FUSED SILICA BODY AND THERMAL REFLOW OF GLASS
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Year of Publication 26.05.2008
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Year of Publication 26.05.2008
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Method to avoid striae in EUV lithography mirrors
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Year of Publication 17.08.2004
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Year of Publication 17.08.2004
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FUSED SILICA BODY AND THERMAL REFLOW OF GLASS
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Year of Publication 15.11.2007
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Year of Publication 15.11.2007
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FUSED SILICA BODY AND THERMAL REFLOW OF GLASS
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Year of Publication 22.03.2007
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Year of Publication 22.03.2007
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Thermal reflow of glass and fused silica body
CHU POLLY W, LIKITVANICHKUL SUMALEE, SEMPOLINSKI DANIEL R, WALTERS MICHAEL J, HOBBS THOMAS W, BURDETTE STEVEN R, FAGAN JAMES G, TAFT TERRY L
Year of Publication 15.03.2007
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Year of Publication 15.03.2007
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A METHOD TO AVOID STRIAE IN EUV LITHOGRAPHY MIRRORS
HOBBS, THOMAS, W, EDWARDS, MARY, J, MURRAY, GREGORY, L, DAVIS, CLAUDE, L., JR, BEST, MICHAEL, E
Year of Publication 01.12.2004
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Year of Publication 01.12.2004
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Method to avoid striae in EUV lithography mirrors
MURRAY GREGORY L, EDWARDS MARY J, HOBBS THOMAS W, DAVIS, JR. CLAUDE L, BEST MICHAEL E
Year of Publication 17.08.2004
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Year of Publication 17.08.2004
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Method to avoid striae in EUV lithography mirrors
MURRAY GREGORY L, EDWARDS MARY J, HOBBS THOMAS W, DAVIS CLAUDE L, BEST MICHAEL E
Year of Publication 18.04.2002
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Year of Publication 18.04.2002
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A METHOD TO AVOID STRIAE IN EUV LITHOGRAPHY MIRRORS
HOBBS, THOMAS, W, EDWARDS, MARY, J, MURRAY, GREGORY, L, DAVIS, CLAUDE, L., JR, BEST, MICHAEL, E
Year of Publication 09.07.2003
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Year of Publication 09.07.2003
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A METHOD TO AVOID STRIAE IN EUV LITHOGRAPHY MIRRORS
HOBBS, THOMAS, W, EDWARDS, MARY, J, MURRAY, GREGORY, L, DAVIS, CLAUDE, L., JR, BEST, MICHAEL, E
Year of Publication 25.04.2002
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Year of Publication 25.04.2002
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