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IMPRINT METHOD, IMPRINT DEVICE, AND DEVICE MANUFACTURING METHOD

IMPRINT METHOD, IMPRINT DEVICE, AND DEVICE MANUFACTURING METHOD

by HIURA MITSURU, SATO KOJI
Year of Publication 13.07.2017

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Patent

IMPRINTING METHOD IMPRINTING APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINTING METHOD IMPRINTING APPARATUS AND ARTICLE MANUFACTURING METHOD

by HIURA MITSURU, SATO HIROSHI
Year of Publication 07.06.2017

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Patent

IMPRINT METHOD, IMPRINT APPARATUS AND DEVICE MANUFACTURING METHOD

IMPRINT METHOD, IMPRINT APPARATUS AND DEVICE MANUFACTURING METHOD

by HIURA MITSURU, SATO KOJI
Year of Publication 08.12.2014

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Patent

IMPRINTING METHOD, IMPRINTING APPARATUS, AND DEVICE MANUFACTURING METHOD

IMPRINTING METHOD, IMPRINTING APPARATUS, AND DEVICE MANUFACTURING METHOD

by HIURA MITSURU, SATO HIROSHI
Year of Publication 05.12.2014

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Patent

IMPRINT DEVICE, IMPRINT METHOD AND METHOD OF MANUFACTURING ARTICLE

IMPRINT DEVICE, IMPRINT METHOD AND METHOD OF MANUFACTURING ARTICLE

by MURAKAMI YOSUKE, NAKAGAWA KAZUKI, HIURA MITSURU
Year of Publication 16.07.2015

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Patent

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

by HIURA MITSURU, SUZUKI AKIYOSHI, SHINODA KEN ICHIRO
Year of Publication 08.08.2013

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Patent

IMPRINT APPARATUS, ARTICLE MANUFACTURING METHOD AND PATTERN TRANSFER METHOD

IMPRINT APPARATUS, ARTICLE MANUFACTURING METHOD AND PATTERN TRANSFER METHOD

by HIURA MITSURU, SHINODA KENICHIRO, SUZUKI AKIYOSHI
Year of Publication 24.07.2013

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Patent

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME

by HAYASHI TATSUYA, HIURA MITSURU, HASEGAWA NORIYASU, MATSUDA YOZO
Year of Publication 04.09.2014

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Patent

Effect of Lipid Solubility and Dose on the Elimination of Barbiturates in Rabbits

Effect of Lipid Solubility and Dose on the Elimination of Barbiturates in Rabbits

by KANENIWA, NOBUYOSHI, HIURA, MITSURU, NAKAGAWA, SHINJI
Published in Chemical & pharmaceutical bulletin (01.01.1979)

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Journal Article

Imprinting method, imprinting apparatus, and device manufacturing method

Imprinting method, imprinting apparatus, and device manufacturing method

by Hiura Mitsuru, Sato Hiroshi
Year of Publication 13.09.2016

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Patent

Studies on Absorption of Suppositories. VII. Effect of the Amount of Base on Absorption of Sulfonamides from Rabbit Rectum

Studies on Absorption of Suppositories. VII. Effect of the Amount of Base on Absorption of Sulfonamides from Rabbit Rectum

by TSUCHIYA, SEISHI, HIURA, MITSURU, MATSUMARU, HIDEO
Published in Chemical & pharmaceutical bulletin (1977)

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Journal Article

Imprint apparatus

Imprint apparatus

by Hiura, Mitsuru, Murakami, Yosuke, Nakagawa, Kazuki
Year of Publication 11.09.2018

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Patent

IMPRINTING METHOD, IMPRINTING APPARATUS, AND DEVICE MANUFACTURING METHOD

IMPRINTING METHOD, IMPRINTING APPARATUS, AND DEVICE MANUFACTURING METHOD

by HIURA MITSURU, SATO HIROSHI
Year of Publication 27.11.2014

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Patent

Effect of Fasting on the Elimination of Barbital and Phenobarbital in Rabbits

Effect of Fasting on the Elimination of Barbital and Phenobarbital in Rabbits

by KANENIWA, NOBUYOSHI, HIURA, MITSURU, FUNAKI, TOMOO
Published in Chemical & pharmaceutical bulletin (01.01.1979)

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Journal Article

Imprint apparatus and article manufacturing method

Imprint apparatus and article manufacturing method

by Shinoda Ken-ichiro, Suzuki Akiyoshi, Hiura Mitsuru
Year of Publication 06.03.2018

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Patent

High Volume Semiconductor Manufacturing Using Nanoimprint Lithography

High Volume Semiconductor Manufacturing Using Nanoimprint Lithography

by Takabayashi, Yukio, Iwanaga, Takehiko, Hiura, Mitsuru, Morohoshi, Hiroshi, Hayashi, Tatsuya, Komaki, Takamitsu, Morimoto, Osamu, Sakai, Keita, Zhang, Wei, Cherala, Anshuman, Im, Se-Hyuk, Meissl, Mario, Choi, Jin
Published in 2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (01.04.2020)

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Conference Proceeding

IMPRINT METHOD, IMPRINT APPARATUS AND DEVICE MANUFACTURING METHOD

IMPRINT METHOD, IMPRINT APPARATUS AND DEVICE MANUFACTURING METHOD

by HIURA MITSURU, SATO KOJI
Year of Publication 02.08.2019

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Patent

POSITION DETECTING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

POSITION DETECTING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

by HIURA MITSURU
Year of Publication 12.11.2009

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Patent

Exposure apparatus and device manufacturing method

Exposure apparatus and device manufacturing method

by HIURA, MITSURU
Year of Publication 30.09.2009

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Patent

Imprint apparatus including alignment and overlay measurement

Imprint apparatus including alignment and overlay measurement

by Shinoda Ken-ichiro, Suzuki Akiyoshi, Hiura Mitsuru
Year of Publication 11.04.2017

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Patent