Low-pressure plasma-etching of bulk polymer materials using gas mixture of CF4 and O2
Nabesawa, Hirofumi, Hiruma, Takaharu, Hitobo, Takeshi, Wakabayashi, Suguru, Asaji, Toyohisa, Abe, Takashi, Seki, Minoru
Published in AIP advances (01.11.2013)
Published in AIP advances (01.11.2013)
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Journal Article
Microstructure Formation on Polytetrafluoroethylene (PTFE) and Perfluoroalkoxy (PFA) Bulk Plates by a Magnetron Enhanced Reactive Ion Etching System
NABESAWA, Hirofumi, HITOBO, Takeshi, ASAJI, Toyohisa, ABE, Takashi, SEKI, Minoru
Published in Journal of the Vacuum Society of Japan (2017)
Published in Journal of the Vacuum Society of Japan (2017)
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Journal Article
プラズマエッチングによるマイクロ流体チップ用チタン製微細金型製造技術の開発
人母, 岳, 城木, 正博, 鍋澤, 浩文, 浅地, 豊久, 安部, 隆
Published in Journal of the Vacuum Society of Japan (01.01.2017)
Published in Journal of the Vacuum Society of Japan (01.01.2017)
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Journal Article
Low-pressure plasma-etching of bulk polymer materials using gas mixture of CF{sub 4} and O{sub 2}
Nabesawa, Hirofumi, Central Research Institute, Toyama Industrial Technology Center, Takaoka, 933-0981, Hiruma, Takaharu, Seki, Minoru, Hitobo, Takeshi, Wakabayashi, Suguru, Asaji, Toyohisa, Electronic-Mechanical Engineering Department, Oshima National College of Maritime Technology, Suo-Oshima, 742-2193, Abe, Takashi
Published in AIP advances (15.11.2013)
Published in AIP advances (15.11.2013)
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Journal Article
MANUFACTURING METHOD OF MICRO PILLAR ARRAY ELEMENT, MANUFACTURING DEVICE AND MICRO PILLAR ARRAY ELEMENT
NABESAWA HIROFUMI, WAKABAYASHI TAKASHI, NAKATANI ISAO, HITOBO TAKESHI
Year of Publication 13.03.2008
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Year of Publication 13.03.2008
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