Search Results - "HISHIYA SHINGO" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD

by SON SUNG DUK, HISHIYA SHINGO
Year of Publication 28.09.2021

Get full text

Patent

SUBSTRATE PROCESSING DEVICE AND CLEANING METHOD

SUBSTRATE PROCESSING DEVICE AND CLEANING METHOD

by SON SUNG DUK, HISHIYA SHINGO
Year of Publication 27.09.2021

Get full text

Patent

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

by OUCHI MIKI, SON SUNG DUK, KIKUCHI YASUAKI, HIROTA NOBUYUKI, HISHIYA SHINGO, YAMAGUCHI TATSUYA
Year of Publication 11.01.2024

Get full text

Patent

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

by OUCHI MIKI, SON SUNG DUK, KIKUCHI YASUAKI, HIROTA NOBUYUKI, HISHIYA SHINGO, YAMAGUCHI TATSUYA
Year of Publication 02.01.2024

Get full text

Patent

CLEANING METHOD AND FILM FORMING APPARATUS

CLEANING METHOD AND FILM FORMING APPARATUS

by KAKIMOTO AKINOBU, SON SUNG DUK, HISHIYA SHINGO
Year of Publication 27.09.2019

Get full text

Patent

CLEANING METHOD AND FILM GROWTH MACHINE

CLEANING METHOD AND FILM GROWTH MACHINE

by KAKIMOTO AKINOBU, SON SUNG DUK, HISHIYA SHINGO
Year of Publication 26.09.2019

Get full text

Patent

SEMICONDUCTOR PRODUCTION APPARATUS, DEPOSITION METHOD AND STORAGE MEDIUM

SEMICONDUCTOR PRODUCTION APPARATUS, DEPOSITION METHOD AND STORAGE MEDIUM

by MOTOYAMA YUTAKA, HISHIYA SHINGO
Year of Publication 24.09.2015

Get full text

Patent

GAS INTRODUCTION STRUCTURE, HEAT TREATMENT DEVICE, AND GAS SUPPLY METHOD

GAS INTRODUCTION STRUCTURE, HEAT TREATMENT DEVICE, AND GAS SUPPLY METHOD

by OGAWA SATORU, SON SUNG DUK, KITAMURA MASAYUKI, HISHIYA SHINGO
Year of Publication 14.01.2021

Get full text

Patent

GAS INTRODUCTION STRUCTURE THERMAL PROCESSING APPARATUS AND GAS SUPPLY METHOD

GAS INTRODUCTION STRUCTURE THERMAL PROCESSING APPARATUS AND GAS SUPPLY METHOD

by OGAWA SATORU, SON SUNG DUK, KITAMURA MASAYUKI, HISHIYA SHINGO
Year of Publication 05.01.2021

Get full text

Patent

BOARD LOADING METHOD AND HEAT TREATMENT DEVICE

BOARD LOADING METHOD AND HEAT TREATMENT DEVICE

by BERNHARD ZOBEL, VOLKER HEMEL, SON SUNG DUK, IKEGAWA HIROAKI, HISHIYA SHINGO
Year of Publication 02.05.2022

Get full text

Patent

BOAT CARRY-IN METHOD AND HEAT TREATMENT APPARATUS

BOAT CARRY-IN METHOD AND HEAT TREATMENT APPARATUS

by SON SUNG DUK, IKEGAWA HIROAKI, ZOBEL BERNHARD, HISHIYA SHINGO, HEMEL VOLKER
Year of Publication 26.04.2022

Get full text

Patent

METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM

METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM

by SHIMA HIROMI, KIKAMA HIDEJI, HISHIYA SHINGO, GAO JING SHUO
Year of Publication 04.04.2019

Get full text

Patent

METHOD FOR DETECTING ABNORMALITY AND PROCESSOR

METHOD FOR DETECTING ABNORMALITY AND PROCESSOR

by KIKUCHI HIROAKI, TERASAWA NOBUTOSHI, NAGATA TOMOYUKI, NAGAI FUMITOMO, FUKUDOME MOTOSHI, SASAKI KAZUAKI, MIYAHARA TATSUYA, KIKAMA HIDEJI, YABE KAZUO, KITAMURA MASAYUKI, HISHIYA SHINGO, TANABE YUKI
Year of Publication 06.09.2022

Get full text

Patent

ABNORMALITY DETECTION METHOD AND PROCESSING APPARATUS

ABNORMALITY DETECTION METHOD AND PROCESSING APPARATUS

by NAGAI FUMIAKI, KIKUCHI HIROAKI, TERASAWA NOBUTOSHI, NAGATA TOMOYUKI, FUKUDOME MOTOSHI, SASAKI KAZUAKI, MIYAHARA TATSUYA, YABE KAZUO, KIKAMA EIJI, KITAMURA MASAYUKI, HISHIYA SHINGO, TANABE YUKI
Year of Publication 01.09.2022

Get full text

Patent

METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM

METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM

by SHIMA HIROMI, KIKAMA HIDEJI, HISHIYA SHINGO, GAO JING SHUO, SUZUKI KEISUKE
Year of Publication 30.05.2019

Get full text

Patent

METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM

METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM

by KO KYUNG SEOK, SHIMA HIROMI, KIKAMA EIJI, HISHIYA SHINGO, SUZUKI KEISUKE
Year of Publication 09.05.2019

Get full text

Patent

METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM AND STORAGE MEDIUM

METHOD AND APPARATUS FOR FORMING SILICON OXIDE FILM AND STORAGE MEDIUM

by KO KYUNG SEOK, SHIMA HIROMI, KIKAMA EIJI, HISHIYA SHINGO
Year of Publication 21.03.2019

Get full text

Patent

METHOD AND APPARATUS FOR PROCESSING ORGANOSILOXANE FILM

METHOD AND APPARATUS FOR PROCESSING ORGANOSILOXANE FILM

by HISHIYA, SHINGO
Year of Publication 11.11.2004

Get full text

Patent

METHOD AND APPARATUS FOR TREATING ORGANOSILOXANE COATING FILM

METHOD AND APPARATUS FOR TREATING ORGANOSILOXANE COATING FILM

by HISHIYA, SHINGO
Year of Publication 11.11.2004

Get full text

Patent

SURFACE MODIFICATION METHOD AND SURFACE MODIFICATION APPARATUS FOR INTERLAYER INSULATING FILM

SURFACE MODIFICATION METHOD AND SURFACE MODIFICATION APPARATUS FOR INTERLAYER INSULATING FILM

by HISHIYA, SHINGO
Year of Publication 04.11.2004

Get full text

Patent

1
2
3
4
5
6
7
8
9
10
Next
[10]