Characterization of Nb-doped Pb(Zr,Ti)O3 films deposited on stainless steel and silicon substrates by RF-magnetron sputtering for MEMS applications
Fujii, Takamichi, Hishinuma, Yoshikazu, Mita, Tsuyoshi, Naono, Takayuki
Published in Sensors and actuators. A. Physical. (01.09.2010)
Published in Sensors and actuators. A. Physical. (01.09.2010)
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Journal Article
Preparation of Nb doped PZT film by RF sputtering
Fujii, Takamichi, Hishinuma, Yoshikazu, Mita, Tsuyoshi, Arakawa, Takami
Published in Solid state communications (01.11.2009)
Published in Solid state communications (01.11.2009)
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Journal Article
Characterization of Nb-doped Pb(Zr,Ti)O 3 films deposited on stainless steel and silicon substrates by RF-magnetron sputtering for MEMS applications
Fujii, Takamichi, Hishinuma, Yoshikazu, Mita, Tsuyoshi, Naono, Takayuki
Published in Sensors and actuators. A. Physical. (01.09.2010)
Published in Sensors and actuators. A. Physical. (01.09.2010)
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Journal Article
LIGHT SCANNING DEVICE, METHOD FOR DRIVING SAME, AND IMAGE DRAWING SYSTEM
YOSHIZAWA, Hirotoshi, HISHINUMA, Yoshikazu, SONODA, Shinichiro, TANAKA, Nobuya
Year of Publication 03.02.2022
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Year of Publication 03.02.2022
Patent
Characterization of Nb-doped Pb(Zr,Ti)O sub(3) films deposited on stainless steel and silicon substrates by RF-magnetron sputtering for MEMS applications
Fujii, Takamichi, Hishinuma, Yoshikazu, Mita, Tsuyoshi, Naono, Takayuki
Published in Sensors and actuators. A. Physical. (01.09.2010)
Published in Sensors and actuators. A. Physical. (01.09.2010)
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Journal Article
Recent progress on development of sputtered PZT film at FUJIFILM
Hishinuma, Yoshikazu, Fujii, Takamichi, Naono, Takayuki, Arakawa, Takami, Youming Li
Published in 2015 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF), International Symposium on Integrated Functionalities (ISIF), and Piezoelectric Force Microscopy Workshop (PFM) (01.05.2015)
Published in 2015 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF), International Symposium on Integrated Functionalities (ISIF), and Piezoelectric Force Microscopy Workshop (PFM) (01.05.2015)
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Conference Proceeding
LIGHT SCANNING DEVICE, METHOD FOR DRIVING SAME, AND IMAGE DRAWING SYSTEM
YOSHIZAWA, Hirotoshi, HISHINUMA, Yoshikazu, SONODA, Shinichiro, TANAKA, Nobuya
Year of Publication 10.01.2024
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Year of Publication 10.01.2024
Patent
PHYSICAL VAPOR DEPOSITIION WITH IMPEDANCE MATCHING NETWORK
LI YOUMING, BIRKMEYER JEFFREY, HISHINUMA YOSHIKAZU, NAONO TAKAYUKI, FUJII TAKAMICHI
Year of Publication 03.11.2011
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Year of Publication 03.11.2011
Patent