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PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

by SATO, Akihiro, TAKEDA, Tsuyoshi, HIROCHI, Yukitomo
Year of Publication 01.07.2021

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Patent

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

by SATO, Akihiro, TAKEDA, Tsuyoshi, HIROCHI, Yukitomo
Year of Publication 01.07.2021

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Patent

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

by HIROCHI YUKITOMO
Year of Publication 01.10.2019

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Patent

Substrate treatment device, method for manufacturing semiconductor device, and program

Substrate treatment device, method for manufacturing semiconductor device, and program

by HIROCHI, YUKITOMO
Year of Publication 16.09.2019

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Patent

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

by NOGAMI, Takashi, YANAGISAWA, Yoshihiko, HIROCHI, Yukitomo
Year of Publication 18.06.2020

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Patent

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

by MICHITA, Noriaki, SASAKI, Shinya, HIROCHI, Yukitomo
Year of Publication 09.01.2020

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Patent

Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium

Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium

by NOGAMI, Takashi, YANAGISAWA, Yoshihiko, YAMAGISHI, Norichika, HIROCHI, Yukitomo
Year of Publication 03.06.2021

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Patent

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

by SATO, Akihiro, TAKEDA, Tsuyoshi, HIROCHI, Yukitomo
Year of Publication 23.05.2019

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Patent

TWI713133B

TWI713133B

by YAHATA, TAKASHI, HIROCHI, YUKITOMO
Year of Publication 11.12.2020

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Patent

Substrate processing apparatus and method of manufacturing semiconductor device

Substrate processing apparatus and method of manufacturing semiconductor device

by NAOFUMI OHASHI, YUKITOMO HIROCHI
Year of Publication 01.07.2015

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Patent

Substrate processing apparatus and method of manufacturing semiconductor device

Substrate processing apparatus and method of manufacturing semiconductor device

by OHASHI NAOFUMI, HIROCHI YUKITOMO
Year of Publication 28.04.2015

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Patent

TWI575638B

TWI575638B

by HIROCHI, YUKITOMO
Year of Publication 21.03.2017

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Patent

SUBSTRATE PROCESSING APPARATUS and METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS and METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

by HIROCHI YUKITOMO
Year of Publication 08.03.2017

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Patent

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

by HIROCHI, YUKITOMO
Year of Publication 01.03.2017

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Patent

SUBSTRATE PROCESSING APPARATUS, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND RECORDING MEDIUM

SUBSTRATE PROCESSING APPARATUS, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND RECORDING MEDIUM

by YAHATA TAKASHI, HIROCHI YUKITOMO
Year of Publication 24.03.2020

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Patent

Substrate processing apparatus

Substrate processing apparatus

by YAHATA, TAKASHI, HIROCHI, YUKITOMO
Year of Publication 16.03.2020

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Patent

Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium

Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium

by YAMAGUCHI, Hideto, SHINOZAKI, Kenji, MURATA, Hitoshi, YANAGISAWA, Yoshihiko, YAMAMOTO, Tetsuo, UENO, Masaaki, SAIDO, Shuhei, HARA, Naoki, KIMURA, Kazuhiro, HIROCHI, Yukitomo
Year of Publication 30.12.2021

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Patent

Substrate treatment device, method for manufacturing semiconductor device, and recording medium

Substrate treatment device, method for manufacturing semiconductor device, and recording medium

by YANAGISAWA YOSHIHIKO, HIROCHI YUKITOMO
Year of Publication 11.01.2019

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Patent

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

by Sato Taketoshi, Hiramatsu Hiroaki, Hirochi Yukitomo
Year of Publication 07.03.2017

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Patent

SUBSTRATE PROCESSING APPARATUS, PROGRAM AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS, PROGRAM AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

by TOYODA Kazuyuki, HIROCHI Yukitomo, SATO Akihiro
Year of Publication 29.09.2016

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Patent

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