Particle-in-cell Monte Carlo collision simulation and experimental measurement of Ar plasma in a fast atom beam source for surface-activated bonding
Morisaki, Ryo, Yamazaki, Takahiro, Oka, Chiemi, Sakurai, Junpei, Hirai, Takami, Takahashi, Tomonori, Tsuji, Hiroyuki, Ohno, Noriyasu, Hata, Seiichi
Published in Japanese Journal of Applied Physics (01.06.2021)
Published in Japanese Journal of Applied Physics (01.06.2021)
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Journal Article
Development of a fast atom beam gun for surface-activated bonding
Morisaki, Ryo, Hirai, Yuuki, Oka, Chiemi, Mizoshiri, Mizue, Yamazaki, Takahiro, Sakurai, Junpei, Hirai, Takami, Takahashi, Tomonori, Tsuji, Hiroyuki, Hata, Seiichi
Published in Precision engineering (01.03.2020)
Published in Precision engineering (01.03.2020)
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Journal Article
Single crystal FBAR with LiNbO3 and LiTaO3 piezoelectric substance layers
Osugi, Y., Yoshino, T., Suzuki, K., Hirai, T.
Published in 2007 IEEE/MTT-S International Microwave Symposium (01.06.2007)
Published in 2007 IEEE/MTT-S International Microwave Symposium (01.06.2007)
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Conference Proceeding
COMBINER FOR DOHERTY AMPLIFIER
NAMERIKAWA MASAHIKO, HORIO YASUFUMI, OKUBO HIDEAKI, MIZUMA ATSUO, TSURUOKA TATSUYA, YANO SHINSUKE, HIRAI TAKAMI
Year of Publication 28.04.2011
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Year of Publication 28.04.2011
Patent
PASSIVE COMPONENT
MIZUTANI, YASUHIKO, HIRAI, TAKAMI, KIMURA, HIRONOBU, TAKEUCHI, HIROTAKA
Year of Publication 12.04.2007
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Year of Publication 12.04.2007
Patent