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CHARGED PARTICLE BEAM DRAWING APPARATUS AND APERTURE

CHARGED PARTICLE BEAM DRAWING APPARATUS AND APERTURE

by YAMADA HIROSHI, HINATA NOBORU
Year of Publication 22.10.2020

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Patent

BEAM DETECTOR, MULTI-CHARGED PARTICLE BEAM IRRADIATION DEVICE, AND BEAM DETECTOR ADJUSTMENT METHOD

BEAM DETECTOR, MULTI-CHARGED PARTICLE BEAM IRRADIATION DEVICE, AND BEAM DETECTOR ADJUSTMENT METHOD

by KIMURA HAYAO, MIZOGUCHI HIRONORI, AKENO MASANOBU, HINATA NOBORU, SATO YASUHISA
Year of Publication 09.05.2024

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Patent