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Year of Publication 22.05.2023
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Year of Publication 25.08.2022
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YE ZHIYUAN, CHU SCHUBERT S, RAO PREETHAM, BAUTISTA KEVIN JOSEPH, HILKENE MARTIN A, MYO NYI O, GAJENDRA PALAMURALI, SANCHEZ ERROL ANTONIO C, COLLINS RICHARD O, HOLMGREN DOUGLAS E, SHAH KARTIK
Year of Publication 24.05.2018
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Year of Publication 24.05.2018
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METHODS AND APPARATUS FOR CONFORMAL DOPING
VELLAIKAL MANOJ, HILKENE MARTIN A, SANTHANAM KARTIK, LEE MARK R, PORSHNEV PETER I, SCOTNEY CASTLE MATTHEW D
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Year of Publication 03.02.2014
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Year of Publication 19.10.2011
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Year of Publication 19.10.2011
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REMOVAL OF SURFACE DOPANTS FROM A SUBSTRATE
HILKENE MARTIN A, GALLO BIAGIO, SANTHANAM KARTIK, RAMASWAMY KARTIK, HANAWA HIROJI, FOAD MAJEED A, COLLINS KENNETH S, SCOTNEY CASTLE MATTHEW D
Year of Publication 02.11.2011
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Year of Publication 02.11.2011
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PLASMA IMMERSION ION IMPLANTATION PROCESS WITH CHAMBER SEASONING AND SEASONING LAYER PLASMA DISCHARGING FOR WAFER DECHUCKING
VELLAIKAL MANOJ, HILKENE MARTIN A, SANTHANAM KARTIK, FOAD MAJEED A, TA YEN B, LAI CANFENG, PORSHNEV PETER I, SCOTNEY CASTLE MATTHEW D
Year of Publication 04.01.2011
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Year of Publication 04.01.2011
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REMOVAL OF SURFACE DOPANTS FROM A SUBSTRATE
HILKENE MARTIN A, GALLO BIAGIO, SANTHANAM KARTIK, RAMASWAMY KARTIK, HANAWA HIROJI, FOAD MAJEED A, COLLINS KENNETH S, SCOTNEY CASTLE MATTHEW D
Year of Publication 11.10.2010
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Year of Publication 11.10.2010
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