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Year of Publication 31.10.2013
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Year of Publication 31.10.2013
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Plasma Doping Of Silicon-Containing Films
SCOTNEY-CASTLE MATTHEW D, XIA LI-QUN, HILKENE MARTIN A, NGUYEN VICTOR, LI NING, BALSEANU MIHAELA
Year of Publication 18.09.2014
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Year of Publication 18.09.2014
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Methods for quantitative measurement of a plasma immersion process
VELLAIKAL MANOJ, YAO DAPING, SCOTNEY-CASTLE MATTHEW D, HILKENE MARTIN A, PORSHNEV PETER I
Year of Publication 23.07.2013
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Year of Publication 23.07.2013
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DEMAGNETIZATION OF MAGNETIC MEDIA BY C DOPING FOR HDD PATTERNED MEDIA APPLICATION
SCOTNEY-CASTLE MATTHEW D, HILKENE MARTIN A, GOUK ROMAN, PORSHNEV PETER I
Year of Publication 27.06.2013
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Year of Publication 27.06.2013
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METHODS FOR QUANTITATIVE MEASUREMENT OF A PLASMA IMMERSION PROCESS
VELLAIKAL, MANOJ, HILKENE, MARTIN A, PORSHNEV, PETER I, YAO, DAPING, SCOTNEY-CASTLE, MATTHEW D
Year of Publication 06.06.2013
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Year of Publication 06.06.2013
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METHODS FOR QUANTITATIVE MEASUREMENT OF A PLASMA IMMERSION PROCESS
VELLAIKAL MANOJ, YAO DAPING, SCOTNEY-CASTLE MATTHEW D, HILKENE MARTIN A, PORSHNEV PETER I
Year of Publication 30.05.2013
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Year of Publication 30.05.2013
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Methods and apparatus for conformal doping
VELLAIKAL MANOJ, SCOTNEY-CASTLE MATTHEW D, HILKENE MARTIN A, SANTHANAM KARTIK, LEE MARK R, PORSHNEV PETER I
Year of Publication 06.08.2013
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Year of Publication 06.08.2013
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INTEGRATED PLATFORM FOR IN-SITU DOPING AND ACTIVATION OF SUBSTRATES
SCOTNEY-CASTLE MATTHEW D, HILKENE MARTIN A, RAMAMURTHY SUNDAR, SANTHANAM KARTIK, SRINIVASAN SWAMINATHAN, PORSHNEV PETER I
Year of Publication 12.04.2012
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Year of Publication 12.04.2012
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METHODS AND APPARATUS FOR CONFORMAL DOPING
VELLAIKAL, MANOJ, HILKENE, MARTIN A, LEE, MARK R, PORSHNEV, PETER I, SCOTNEY-CASTLE, MATTHEW D, SANTHANAM, KARTIK
Year of Publication 04.04.2013
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Year of Publication 04.04.2013
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RESIST FORTIFICATION FOR MAGNETIC MEDIA PATTERNING
SCOTNEY-CASTLE MATTHEW D, VERHAVERBEKE STEVEN, LEE YONG-WON, XIA LI-QUN, HILKENE MARTIN A, GOUK ROMAN, PORSHNEV PETER I, BENCHER CHRISTOPHER DENNIS
Year of Publication 29.05.2014
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Year of Publication 29.05.2014
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Method for removing implanted photo resist from hard disk drive substrates
SCOTNEY-CASTLE MATTHEW D, VERHAVERBEKE STEVEN, HILKENE MARTIN A, FOAD MAJEED A, GOUK ROMAN, PORSHNEV PETER I
Year of Publication 15.01.2013
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Year of Publication 15.01.2013
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Diode laser for wafer heating for EPI processes
HILKENE, MARTIN A, GAJENDRA, PALAMURALI, BAUTISTA, KEVIN JOSEPH, CHU, SCHUBERT S, SANCHEZ, ERROL ANTONIO C, HOLMGREN, DOUGLAS E, COLLINS, RICHARD O, SHAH, KARTIK, MYO, NYI O, RAO, PREETHAM, YE, ZHI-YUAN
Year of Publication 01.08.2020
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Year of Publication 01.08.2020
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Resist fortification for magnetic media patterning
SCOTNEY-CASTLE MATTHEW D, VERHAVERBEKE STEVEN, LEE YONG-WON, XIA LI-QUN, HILKENE MARTIN A, BENCHER CHRISTOPHER D, GOUK ROMAN, PORSHNEV PETER I
Year of Publication 25.02.2014
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Year of Publication 25.02.2014
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CHAMBER FOR PROCESSING HARD DISK DRIVE SUBSTRATES
HILKENE, MARTIN A, FOAD, MAJEED ALI, PORSHNEV, PETER I, MARIN, JOSE-ANTONIO, SCOTNEY-CASTLE, MATTHEW D
Year of Publication 15.09.2011
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Year of Publication 15.09.2011
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METHODS AND APPARATUS FOR CONFORMAL DOPING
VELLAIKAL, MANOJ, HILKENE, MARTIN A, LEE, MARK R, PORSHNEV, PETER I, SCOTNEY-CASTLE, MATTHEW D, SANTHANAM, KARTIK
Year of Publication 06.12.2012
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Year of Publication 06.12.2012
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REDUCING PHOTORESIST LAYER DEGRADATION IN PLASMA IMMERSION ION IMPLANTATION
TA, YEN, B, FOAD, MAJEED, A, HILKENE, MARTIN, A, PORSHNEV, PETER, I, SANTHANAM, KARTIK
Year of Publication 29.08.2011
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Year of Publication 29.08.2011
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