ATOMIC OXYGEN DETECTION IN SEMICONDUCTOR PROCESSING CHAMBERS
HOWELLS, Samuel C, ADAMS, Bruce E, HILKENE, Martin A, MARIN, Jose Antonio
Year of Publication 24.03.2022
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Year of Publication 24.03.2022
Patent
ATOMIC OXYGEN DETECTION IN SEMICONDUCTOR PROCESSING CHAMBERS
Adams, Bruce E, Hilkene, Martin A, Howells, Samuel C, Marin, Jose Antonio
Year of Publication 24.03.2022
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Year of Publication 24.03.2022
Patent
DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
COLLINS, Richard O, CHU, Schubert S, GAJENDRA, Palamurali, BAUTISTA, Kevin Joseph, HOLMGREN, Douglas E, RAO, Preetham, YE, Zhiyuan, HILKENE, Martin A, SANCHEZ, Errol Antonio C, SHAH, Kartik, MYO, Nyi O
Year of Publication 28.03.2023
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Year of Publication 28.03.2023
Patent
DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
COLLINS, Richard O, CHU, Schubert S, GAJENDRA, Palamurali, BAUTISTA, Kevin Joseph, HOLMGREN, Douglas E, RAO, Preetham, YE, Zhiyuan, HILKENE, Martin A, SANCHEZ, Errol Antonio C, SHAH, Kartik, MYO, Nyi O
Year of Publication 22.02.2023
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Year of Publication 22.02.2023
Patent
DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
COLLINS, Richard O, CHU, Schubert S, GAJENDRA, Palamurali, BAUTISTA, Kevin Joseph, HOLMGREN, Douglas E, RAO, Preetham, YE, Zhiyuan, HILKENE, Martin A, SANCHEZ, Errol Antonio C, SHAH, Kartik, MYO, Nyi O
Year of Publication 05.10.2022
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Year of Publication 05.10.2022
Patent