Development of an adjacent three-point MEMS heat flux sensor for internal combustion engines
DEJIMA, Kazuhito, NAKABEPPU, Osamu, NAKAMURA, Yuto, TSUCHIYA, Tomohiro, NAGASAKA, Keisuke, HIGUCHI, Masaaki
Published in Kikai Gakkai ronbunshū = Transactions of the Japan Society of Mechanical Engineers (2018)
Published in Kikai Gakkai ronbunshū = Transactions of the Japan Society of Mechanical Engineers (2018)
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Journal Article
Control of Nitrogen Depth Profile near Silicon Oxynitride/Si(100) Interface Formed by Radical Nitridation
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Published in Japanese Journal of Applied Physics (01.08.2006)
Published in Japanese Journal of Applied Physics (01.08.2006)
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Journal Article
Control of Nitrogen Depth Profile and Chemical Bonding State in Silicon Oxynitride Films Formed by Radical Nitridation
Kawase, Kazumasa, Umeda, Hiroshi, Inoue, Masao, Tsujikawa, Shimpei, Akamatsu, Yasuhiko, Suwa, Tomoyuki, Higuchi, Masaaki, Komura, Masanori, Teramoto, Akinobu, Ohmi, Tadahiro
Published in Japanese Journal of Applied Physics (01.10.2005)
Published in Japanese Journal of Applied Physics (01.10.2005)
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Journal Article
DROPLET DISPENSING DEVICE
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Year of Publication 18.10.2018
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Year of Publication 18.10.2018
Patent
NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
HIGUCHI, Masaaki, SONEHARA, Takeshi, HIRAI, Takahiro, SHIMIZU, Takashi
Year of Publication 25.01.2024
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Year of Publication 25.01.2024
Patent