Search Results - "HIGUCHI KAZUHITO" :: K.UTB vyhledávací portál

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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

by HIGUCHI KAZUHITO
Year of Publication 21.03.2023

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Patent

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金属援用エッチングを用いたSiの微細加工における高分子添加剤による欠陥抑制

by 佐野, 光雄, 小幡, 進, 田嶋, 尚之, 浮田, 康成, 樋口, 和人, 松本, 歩, 八重, 真治
Published in スマートプロセス学会誌 (10.09.2022)

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Journal Article

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Electrode Kinetic Study of Cu Electrodeposition with Supercritical CO 2 by High Pressure Rotating Disk Electrode Method

by Higuchi, Kazuhito, Chang, Tso-Fu Mark, Sone, Masato
Published in Journal of the Electrochemical Society (01.02.2022)

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Journal Article

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Electrochemical Investigation of Cu Electroplating with Supercritical CO2 Emulsion Using a Rotating Disk Electrode under High Pressure

by Higuchi, Kazuhito, Chang, Tso-Fu Mark, Sone, Masato
Published in Journal of the Electrochemical Society (01.12.2020)

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Journal Article

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Electrochemical Investigation of Cu Electroplating with Supercritical CO 2 Emulsion Using a Rotating Disk Electrode under High Pressure

by Higuchi, Kazuhito, Chang, Tso-Fu Mark, Sone, Masato
Published in Journal of the Electrochemical Society (01.12.2020)

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Journal Article

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Electrode Kinetic Study of Cu Electrodeposition with Supercritical CO2 by High Pressure Rotating Disk Electrode Method

by Higuchi, Kazuhito, Chang, Tso-Fu Mark, Sone, Masato
Published in Journal of the Electrochemical Society (01.02.2022)

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Journal Article

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METHOD FOR MANUFACTURING STRUCTURE AND METHOD FOR MANUFACTURING CAPACITOR

by HIGUCHI KAZUHITO, OBATA SUSUMU, TAJIMA TAKAYUKI, SANO MITSUO
Year of Publication 26.09.2023

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Patent

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ETCHING METHOD

by HIGUCHI KAZUHITO, OBATA SUSUMU, TAJIMA TAKAYUKI, SANO MITSUO
Year of Publication 21.03.2023

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Patent

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SEMICONDUCTOR DEVICE

by HIGUCHI KAZUHITO, OBATA SUSUMU, TAJIMA TAKAYUKI, SANO MITSUO
Year of Publication 30.09.2022

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Patent

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ETCHING METHOD

by HIGUCHI KAZUHITO, OBATA SUSUMU, TAJIMA TAKAYUKI, SANO MITSUO
Year of Publication 27.09.2022

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Patent

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A novel wafer dicing method using metal-assisted chemical etching

by Asano, Yusaku, Matsuo, Keiichiro, Ito, Hisashi, Higuchi, Kazuhito, Shimokawa, Kazuo, Sato, Tsuyoshi
Published in 2015 IEEE 65th Electronic Components and Technology Conference (ECTC) (01.05.2015)

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Conference Proceeding

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Defect Suppression by Polymer Additive in Si Microfabrication Using Metal Assisted Chemical Etching

by SANO, Mitsuo, OBATA, Susumu, TAJIMA, Takayuki, UKITA, Yasunari, HIGUCHI, Kazuhito, MATSUMOTO, Ayumu, YAE, Shinji
Published in Journal of Smart Processing (10.09.2022)

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Journal Article