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HICKS III ALBERT BARRETT, TAE PATRICK JOHN, SALY MARK JOSEPH, ENMAN LISA J, SUN JENNIFER, WILLWERTH MICHAEL D, PAN YAOLING, KRAUS PHILIP ALLAN, LI XIAOPU, BERA KALLOL, MCCORMICK DANIEL THOMAS, TEDESCHI LEONARD
Year of Publication 26.10.2022
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Year of Publication 26.10.2022
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Metal oxyfluoride film formation methods
Hicks, III, Albert Barrett, Natu, Gayatri, Goradia, Prerna Sonthalia, Sun, Jennifer Y, Deepak, Nitin
Year of Publication 18.07.2023
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Year of Publication 18.07.2023
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METAL OXYFLUORIDE FILM FORMATION METHODS
Hicks, III, Albert Barrett, Natu, Gayatri, Goradia, Prerna Sonthalia, Sun, Jennifer Y, Deepak, Nitin
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Year of Publication 18.08.2022
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Capacitive sensor for chamber condition monitoring
Saly, Mark Joseph, Tae, Patrick John, Sun, Jennifer, Li, Xiaopu, Pan, Yaoling, Tedeschi, Leonard, Willwerth, Michael D, Hicks, III, Albert Barrett, Bera, Kallol, McCormick, Daniel Thomas, Kraus, Philip Allan, Enman, Lisa J
Year of Publication 14.02.2023
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Year of Publication 14.02.2023
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CAPACITIVE SENSOR FOR CHAMBER CONDITION MONITORING
Saly, Mark Joseph, Tae, Patrick John, Sun, Jennifer, Li, Xiaopu, Pan, Yaoling, Tedeschi, Leonard, Willwerth, Michael D, Hicks, III, Albert Barrett, Bera, Kallol, McCormick, Daniel Thomas, Kraus, Philip Allan, Enman, Lisa J
Year of Publication 09.09.2021
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Year of Publication 09.09.2021
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Capacitive sensor and processing tool for chamber condition monitoring
PAN, YAOLING, TEDESCHI, LEONARD, ENMAN, LISA J, KRAUS, PHILIP ALLAN, LI, XIAOPU, SALY, MARK JOSEPH, TAE, PATRICK JOHN, BERA, KALLOL, WILLWERTH, MICHAEL D, HICKS III, ALBERT BARRETT, MCCORMICK, DANIEL THOMAS, SUN, JENNIFER
Year of Publication 21.01.2024
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Year of Publication 21.01.2024
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Capacitive sensor for chamber condition monitoring
PAN, YAOLING, TEDESCHI, LEONARD, ENMAN, LISA J, KRAUS, PHILIP ALLAN, SALY, MARK JOSEPH, TAE, PATRICK JOHN, BERA, KALLOL, WILLWERTH, MICHAEL D, HICKS III, ALBERT BARRETT, MCCORMICK, DANIEL THOMAS, SUN, JENNIFER, LI, XIAO-PU
Year of Publication 01.01.2022
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Year of Publication 01.01.2022
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