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Year of Publication 25.07.2018
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마이크로 기계식 요 레이트 센서 및 그 제조 방법
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Year of Publication 25.07.2018
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Year of Publication 25.07.2018
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Year of Publication 09.01.2017
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Year of Publication 09.01.2017
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Mechanical characterization of individual polycrystalline carbon tubes for use in electrical nano-interconnects
Khiat, A., Poelma, R.H., Zhang, G.Q., Heuck, F., Tichelaar, F.D., Sarno, M., Ciambelli, P., Fontorbes, S., Arurault, L., Staufer, U.
Published in Microelectronic engineering (01.10.2012)
Published in Microelectronic engineering (01.10.2012)
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Method for producing a wafer connection
Senz, Volkmar, Tomaschko, Jochen, Schmollngruber, Peter, Heuck, Friedjof, Friedrich, Thomas, Rohlfing, Franziska
Year of Publication 09.07.2024
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Year of Publication 09.07.2024
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METHOD FOR PRODUCING A BONDING PAD FOR A MICROMECHANICAL SENSOR ELEMENT
Prinzen, Andreas, Schorr, Nicolas, Schwenk, Christof, Reichenbach, Frank, Stahl, Heiko, Heuck, Friedjof
Year of Publication 13.07.2023
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Year of Publication 13.07.2023
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