Verfahren und Vorrichtung zum Herstellen eines Multilagenelektrodensystems
SCHELLING, CHRISTOPH, LEIDICH, STEFAN, PIRK, TJALF, HEUCK, FRIEDJOF, KRAUSS, ANDREAS
Year of Publication 17.07.2014
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Year of Publication 17.07.2014
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METHOD AND DEVICE FOR PRODUCING A MULTI-LAYER ELECTRODE SYSTEM
SCHELLING, CHRISTOPH, LEIDICH, STEFAN, PIRK, TJALF, HEUCK, FRIEDJOF, KRAUSS, ANDREAS
Year of Publication 17.07.2014
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Year of Publication 17.07.2014
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Herstellungsverfahren für ein mikromechanisches Bauteil und mikromechanisches Bauteil
SCHELLING, CHRISTOPH, HATTASS, MIRKO, SCHMIDT, BENJAMIN, HEUCK, FRIEDJOF
Year of Publication 17.04.2014
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Year of Publication 17.04.2014
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MICROMECHANICAL YAW RATE SENSOR AND METHOD FOR OPERATING SAME
NEUL, Reinhard, HEUCK, Friedjof, PRUETZ, Odd-Axel, HOEPPNER, Christian, OHMS, Torsten, HATTASS, Mirko, SCHEBEN, Rolf, MAUL, Robert, SCHMIDT, Benjamin
Year of Publication 26.05.2017
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Year of Publication 26.05.2017
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MICROMECHANICAL YAW RATE SENSOR AND METHOD FOR THE PRODUCTION THEREOF
NEUL, Reinhard, HEUCK, Friedjof, PRUETZ, Odd-Axel, HOEPPNER, Christian, OHMS, Torsten, HATTASS, Mirko, SCHEBEN, Rolf, MAUL, Robert, SCHMIDT, Benjamin
Year of Publication 26.05.2017
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Year of Publication 26.05.2017
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Mikromechanischer Drehratensensor und Betriebsverfahren desselben
Ohms, Torsten, Neul, Reinhard, Schmidt, Benjamin, Maul, Robert, Hattass, Mirko, Scheben, Rolf, Hoeppner, Christian, Heuck, Friedjof, Pruetz, Odd-Axel
Year of Publication 24.05.2017
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Year of Publication 24.05.2017
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Mikromechanischer Drehratensensor und Verfahren zu dessen Herstellung
Ohms, Torsten, Neul, Reinhard, Schmidt, Benjamin, Maul, Robert, Hattass, Mirko, Scheben, Rolf, Hoeppner, Christian, Heuck, Friedjof, Pruetz, Odd-Axel
Year of Publication 24.05.2017
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Year of Publication 24.05.2017
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Assembly body for micromirror chips, mirror device and production method for a mirror device
DOESSEL, KERRIN, PANTEL, DANIEL, HEUCK, FRIEDJOF, ROHLFING, FRANZISKA, SCHATZ, FRANK, PINTER, STEFAN
Year of Publication 16.11.2015
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Year of Publication 16.11.2015
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ASSEMBLY BODY FOR MICROMIRROR CHIPS, MIRROR DEVICE AND PRODUCTION METHOD FOR A MIRROR DEVICE
DOESSEL, KERRIN, PANTEL, DANIEL, HEUCK, FRIEDJOF, ROHLFING, FRANZISKA, SCHATZ, FRANK, PINTER, STEFAN
Year of Publication 12.11.2015
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Year of Publication 12.11.2015
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Micromechanical component for deflecting light beams in e.g. pico projector, has assembly comprising torsion bars and bending bar, where torsion bars are suspended at drive body over bending bar aligned inclined to longitudinal direction
ECKARDT, MARTIN, TUREK, MONIKA, KRAYL, OLIVER, HEUCK, FRIEDJOF, SCHATZ, FRANK
Year of Publication 14.08.2013
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Year of Publication 14.08.2013
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Mikromechanische Feder für Inertialsensor
Ohms, Torsten, Neul, Reinhard, Schmidt, Benjamin, Maul, Robert, Hattass, Mirko, Scheben, Rolf, Hoeppner, Christian, Heuck, Friedjof, Pruetz, Odd-Axel
Year of Publication 19.05.2016
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Year of Publication 19.05.2016
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Interposer for mounting a vertically hybrid integrated component on a component carrier
REINMUTH JOCHEN, HEUCK FRIEDJOF, HATTASS MIRKO, KRAMER TORSTEN, NEUL REINHARD, CLASSEN JOHANNES, TEBJE LARS, MEISEL DANIEL CHRISTOPH, REICHENBACH RALF, PUYGRANIER ANTOINE
Year of Publication 22.02.2017
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Year of Publication 22.02.2017
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Mikromechanische Struktur und entsprechendes Herstellungsverfahren
STRAUB, RAINER, TRAUTMANN, ACHIM, HEUCK, FRIEDJOF, SCHORR, NICOLAS, BAADER, JOHANNES, ROHLFING, FRANZISKA, PINTER, STEFAN
Year of Publication 16.10.2014
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Year of Publication 16.10.2014
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Interposer für die Montage eines vertikal hybrid integrierten Bauteils auf einem Bauteilträger
TEBJE, LARS, PUYGRANIER, ANTOINE, HATTASS, MIRKO, MEISEL, DANIEL CHRISTOPH, CLASSEN, JOHANNES, NEUL, REINHARD, HEUCK, FRIEDJOF, KRAMER, TORSTEN, REINMUTH, JOCHEN, REICHENBACH, RALF
Year of Publication 17.12.2015
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Year of Publication 17.12.2015
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