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Year of Publication 13.05.2021
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Year of Publication 27.04.2021
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Year of Publication 23.04.2021
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Year of Publication 01.06.2021
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Year of Publication 14.10.2020
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Year of Publication 27.06.2018
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SEPARATOR FOR FUEL CELL STACK
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Year of Publication 09.06.2011
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ORGANIC LIGHT EMITTING DISPLAY DEVICE
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Year of Publication 25.11.2011
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Foup cleaning device
SON, HYUK JOO, CHOI, WOO JIN, HEO, SUNG IL, LEE, MIN YOUNG, PARK, YOUNG SOO, KIM, YOUNG HO, HUR, DONG GEUN
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Year of Publication 01.07.2022
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Substrate processing apparatus
CHOI, WOO JIN, KIM, HAK DOO, HEO, SUNG IL, PARK, YOUNG SOO, KIM, YOUNG HO, PARK, SANG PIL, HUR, DONG GEUN
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Year of Publication 01.04.2022
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Substrate transferring device and substrate processing method using the same minimizing the thermal deformation of the substrate between the substrate and the heating part inside the chamber
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Year of Publication 16.05.2021
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Year of Publication 16.05.2021
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Substrate transfer apparatus and substrate processing method using same
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Year of Publication 11.05.2021
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Year of Publication 11.05.2021
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Substrate processing apparatus capable of improving process efficiency by processing substrates of different sizes in one apparatus without the need for component replacement time and apparatus operation preparation time
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Year of Publication 01.05.2021
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Year of Publication 01.05.2021
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Front opening unified pod (FOUP) cleaning device comprising a snorkel nozzle that is fed with drying air for efficiently drying the snorkel nozzle
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Year of Publication 01.05.2021
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Year of Publication 01.05.2021
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Substrate processing apparatus
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Year of Publication 16.04.2021
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Year of Publication 16.04.2021
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Substrate processing apparatus
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Year of Publication 01.12.2021
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Year of Publication 09.07.2021
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Year of Publication 09.07.2021
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