In-situ monitoring during MBE growth of InAs based heterostructures
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Published in Journal of crystal growth (01.09.2015)
Published in Journal of crystal growth (01.09.2015)
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METHOD FOR CALIBRATING A PYROMETER, METHOD FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTING WAFER AND SYSTEM FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTING WAFER
SCHENK TOBIAS, ZETTLER JOERG THOMAS, HENNINGER BERND, UREDAT STEFFEN, BINETTI MARCELLO, ZILIAN JENS, HABERLAND KOLJA
Year of Publication 22.11.2010
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Year of Publication 22.11.2010
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Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
SCHENK TOBIAS, HENNINGER BERND, UREDAT STEFFEN, BINETTI MARCELLO, ZILIAN JENS, ZETTLER JOERG-THOMAS, HABERLAND KOLJA
Year of Publication 05.03.2013
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Year of Publication 05.03.2013
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Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
HABERLAND, KOLJA, UREDAT, STEFFEN, BINETTI, MARCELLO, ZILIAN, JENS, SCHENK, TOBIAS, HENNINGER, BERND, ZETTLER, JOERG-THOMAS
Year of Publication 18.07.2012
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Year of Publication 18.07.2012
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VERFAHREN ZUR KALIBRIERUNG EINES PYROMETERS, VERFAHREN ZUR BESTIMMUNG DER TEMPERATUR EINES HALBLEITERWAFERS UND SYSTEM ZUR BESTIMMUNG DER TEMPERATUR EINES HALBLEITERWAFERS
HABERLAND, KOLJA, UREDAT, STEFFEN, BINETTI, MARCELLO, ZILIAN, JENS, SCHENK, TOBIAS, HENNINGER, BERND, ZETTLER, JOERG-THOMAS
Year of Publication 15.02.2012
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Year of Publication 15.02.2012
Patent
Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
HABERLAND, KOLJA, UREDAT, STEFFEN, BINETTI, MARCELLO, ZILIAN, JENS, SCHENK, TOBIAS, HENNINGER, BERND, ZETTLER, JOERG-THOMAS
Year of Publication 25.01.2012
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Year of Publication 25.01.2012
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Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
HABERLAND, KOLJA, UREDAT, STEFFEN, BINETTI, MARCELLO, ZILIAN, JENS, SCHENK, TOBIAS, HENNINGER, BERND, ZETTLER, JOERG-THOMAS
Year of Publication 14.09.2011
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Year of Publication 14.09.2011
Patent
METHOD FOR CALIBRATING A PYROMETER, METHOD FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTING WAFER AND SYSTEM FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTING WAFER
SCHENK TOBIAS, HENNINGER BERND, UREDAT STEFFEN, BINETTI MARCELLO, ZILIAN JENS, ZETTLER JOERG-THOMAS, HABERLAND KOLJA
Year of Publication 18.11.2010
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Year of Publication 18.11.2010
Patent
Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer
HABERLAND, KOLJA, UREDAT, STEFFEN, BINETTI, MARCELLO, ZILIAN, JENS, SCHENK, TOBIAS, HENNINGER, BERND, ZETTLER, JOERG-THOMAS
Year of Publication 17.11.2010
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Year of Publication 17.11.2010
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