Wavefront optimization for tuning scanner based on performance matching
SHI ZHAN, HENNERKES CHRISTOPH RENE KONRAD CEBULLA, STAALS FRANK, HSU DUAN FU STEPHEN, HOWELL RAFAEL C, LI XIAOYANG
Year of Publication 11.05.2023
Get full text
Year of Publication 11.05.2023
Patent
성능 매칭에 기초하는 튜닝 스캐너에 대한 파면 최적화
SHI ZHAN, HENNERKES CHRISTOPH RENE KONRAD CEBULLA, STAALS FRANK, HSU DUAN FU STEPHEN, HOWELL RAFAEL C, LI XIAOYANG
Year of Publication 09.02.2021
Get full text
Year of Publication 09.02.2021
Patent
광학 수차를 포함하는 패터닝 공정 개선
JASPER JOHANNES CHRISTIAAN MARIA, VAN ADRI PAULUS JACOBUS MARIA, HENNERKES CHRISTOPH RENE KONRAD CEBULLA, EL SAID AHMAD WASIEM IBRAHIM
Year of Publication 15.07.2020
Get full text
Year of Publication 15.07.2020
Patent
Method of determining lens actuator setting for a patterning apparatus and related non-transitory computer-readable medium
HOWELL, RAFAEL C, SHI, ZHAN, STAALS, FRANK, HSU, DUAN-FU STEPHEN, HENNERKES, CHRISTOPH RENE KONRAD CEBULLA, LI, XIAOYANG JASON
Year of Publication 11.09.2023
Get full text
Year of Publication 11.09.2023
Patent
WAVEFRONT OPTIMIZATION FOR TUNING SCANNER BASED ON PERFORMANCE MATCHING
SHI ZHAN, HENNERKES CHRISTOPH RENE KONRAD CEBULLA, HSU DUAN-FU STEPHEN, STAALS FRANK, HOWELL RAFAEL C, LI XIAOYANG
Year of Publication 02.02.2021
Get full text
Year of Publication 02.02.2021
Patent