리소그래피 장치에서의 동적 가스락 멤브레인과 퓨필 패싯 미러의 수명 종료 모니터링 및 멤브레인 파열의 검출
JILISEN REINIER THEODORUS MARTINUS, ZHOU PING, HUANG ZHUANGXIONG, LYONS JOSEPH HARRY, HENDRIKS JIMI
Year of Publication 07.11.2022
Get full text
Year of Publication 07.11.2022
Patent
RADIATION SOURCE-COLLECTOR AND METHOD FOR REFURBISHMENT
BOOGAARD ARJEN, KEMPEN ANTONIUS, BRUEBACH JOERG, HUIJBREGTSE JEROEN, HUIJSER SASKIA, SINGH HARMEET, HENDRIKS JIMI
Year of Publication 24.06.2013
Get full text
Year of Publication 24.06.2013
Patent
LUMINESCENT LAMP
VINKENVLEUGEL, LUCIUS, T, HELLEBREKERS, WIM, STADLER, FLORIAN, VERSLUIJS, CORNELIS, HENDRIKS, JIMI
Year of Publication 15.07.2010
Get full text
Year of Publication 15.07.2010
Patent
LUMINESCENT LAMP
VINKENVLEUGEL, LUCIUS, T, HELLEBREKERS, WIM, STADLER, FLORIAN, VERSLUIJS, CORNELIS, HENDRIKS, JIMI
Year of Publication 27.05.2010
Get full text
Year of Publication 27.05.2010
Patent
Luminescent lamp
VINKENVLEUGEL, LUCIUS THEODORUS, HELLEBREKERS, WIM, STADLER, FLORIAN, VERSLUIJS, CORNELIS, HENDRIKS, JIMI
Year of Publication 16.03.2011
Get full text
Year of Publication 16.03.2011
Patent