LITHOGRAPHY PROJECTION APPARATUS EMPLOYING CONVERSION LAYER TO REMOVE UNDESIRED GHOST IMAGE FOR IMPROVING DETECTING PROPERTY OF LIGHT DETECTOR, PREPARATION METHOD OF DEVICE AND DEVICE PREPARED BY THE METHOD
VANDEKERHOF MARCUS ADRIANUS, DEBOEIJ WILHELMUS PETRUS, HEMERIK MARCEL MAURICE
Year of Publication 10.06.2004
Get full text
Year of Publication 10.06.2004
Patent
ATOMIC LAYER DEPOSITION HEAD AND METHOD
HEMERIK, Marcel Maurice, VAN DE VELDEN, Marinus Adrianus Elizabeth, KREMERS, Erik Antonius Franciscus
Year of Publication 12.04.2023
Get full text
Year of Publication 12.04.2023
Patent
ATOMIC LAYER DEPOSITION HEAD UNIT AND METHOD
HEMERIK, Marcel Maurice, VAN DE VELDEN, Marinus Adrianus Elizabeth, KREMERS, Erik Antonius Franciscus
Year of Publication 12.04.2023
Get full text
Year of Publication 12.04.2023
Patent
Atomic layer deposition head and method
MARINUS ADRIANUS ELIZABETH VAN DE VELDEN, ERIK ANTONIUS FRANCISCUS KREMERS, MARCEL MAURICE HEMERIK
Year of Publication 28.01.2022
Get full text
Year of Publication 28.01.2022
Patent
Atomic layer deposition head unit and method
MARINUS ADRIANUS ELIZABETH VAN DE VELDEN, MARCEL MAURICE HEMERIK, ERIK ANTONIUS FRANCISCUS KREMERS
Year of Publication 28.01.2022
Get full text
Year of Publication 28.01.2022
Patent
ATOMIC LAYER DEPOSITION HEAD UNIT AND METHOD
HEMERIK, Marcel Maurice, VAN DE VELDEN, Marinus Adrianus Elizabeth, KREMERS, Erik Antonius Franciscus
Year of Publication 16.12.2021
Get full text
Year of Publication 16.12.2021
Patent
ATOMIC LAYER DEPOSITION HEAD AND METHOD
HEMERIK, Marcel Maurice, VAN DE VELDEN, Marinus Adrianus Elizabeth, KREMERS, Erik Antonius Franciscus
Year of Publication 16.12.2021
Get full text
Year of Publication 16.12.2021
Patent
Lithographic apparatus and integrated circuit device manufacturing method
DE BOEIJ, WILHELMUS PETRUS, HEMERIK, MARCEL MAURICE, VAN DE KERHOF, MARCUS ADRIANUS
Year of Publication 01.09.2006
Get full text
Year of Publication 01.09.2006
Patent
SENSOR AND LITHOGRAPHIC APPARATUS
MARCEL MAURICE HEMERIK, JACOB SONNEVELD, MARCUS ADRIANUS VAN DE KERKHOF, JEROEN JOHANNES SOPHIA MARIA MERTENS
Year of Publication 02.08.2007
Get full text
Year of Publication 02.08.2007
Patent
Sensor and lithographic apparatus
VAN DE KERKHOF MARCUS ADRIANUS, BASTIAENSEN ROB ADRIANUS ANTONIUS MARIA, SONNEVELD JACOB, HEMERIK MARCEL MAURICE, MERTENS JEROEN JOHANNES SOPHIA MARIA
Year of Publication 02.12.2008
Get full text
Year of Publication 02.12.2008
Patent