Search Results - "HEISIG, ANDREAS" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Method for the temperature measurement of substrates, and vacuum processing apparatus

Method for the temperature measurement of substrates, and vacuum processing apparatus

by HEISIG ANDREAS, MEYER THOMAS
Year of Publication 06.12.2011

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Patent

Method for the temperature measurement of substrates, and vacuum processing apparatus

Method for the temperature measurement of substrates, and vacuum processing apparatus

by Heisig, Andreas, Meyer, Thomas
Year of Publication 06.12.2011

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Patent

METHOD FOR THE TEMPERATURE MEASUREMENT OF SUBSTRATES, AND VACUUM PROCESSING APPARATUS

METHOD FOR THE TEMPERATURE MEASUREMENT OF SUBSTRATES, AND VACUUM PROCESSING APPARATUS

by HEISIG ANDREAS, MEYER THOMAS
Year of Publication 02.07.2009

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Patent

Method and arrangement for redundant anode sputtering having a dual anode arrangement

Method and arrangement for redundant anode sputtering having a dual anode arrangement

by STRUEMPFEL JOHANNES, MIRRING ENNO, HEISIG ANDREAS, TESCHNER GOETZ
Year of Publication 17.03.2015

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Patent

Vacuum deposition device for coating substrates by PVD comprises a process chamber containing a first process station, an inlet, an outlet and a vacuum robot formed as a drive unit for moving a substrate arranged in the process chamber

Vacuum deposition device for coating substrates by PVD comprises a process chamber containing a first process station, an inlet, an outlet and a vacuum robot formed as a drive unit for moving a substrate arranged in the process chamber

by HEISIG, ANDREAS, GODER, REINHARD
Year of Publication 05.01.2005

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Patent

Verfahren zur Vakuumbeschichtung von zu beschichtenden Substraten und Vakkumbeschichtungsanlage

Verfahren zur Vakuumbeschichtung von zu beschichtenden Substraten und Vakkumbeschichtungsanlage

by HEISIG, ANDREAS, MEYER, THOMAS
Year of Publication 16.12.2010

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Patent

METHOD AND ARRANGEMENT FOR REDUNDANT ANODE SPUTTERING HAVING A DUAL ANODE ARRANGEMENT

METHOD AND ARRANGEMENT FOR REDUNDANT ANODE SPUTTERING HAVING A DUAL ANODE ARRANGEMENT

by STRUEMPFEL JOHANNES, MIRRING ENNO, HEISIG ANDREAS, TESCHNER GOETZ
Year of Publication 16.09.2010

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Patent

Transport apparatus for elongate substrates

Transport apparatus for elongate substrates

by STRUEMPFEL JOHANNES, GOERKE STEFFEN, SCHWERDTFEGER FALK, ULBRICHT ANDRE, BAUER REINHARDT, HEISIG ANDREAS, RICHTER HEIKO
Year of Publication 04.09.2012

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Patent

Transport apparatus for elongate substrates

Transport apparatus for elongate substrates

by Struempfel, Johannes, Bauer, Reinhardt, Heisig, Andreas, Ulbricht, Andre, Goerke, Steffen, Richter, Heiko, Schwerdtfeger, Falk
Year of Publication 04.09.2012

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Patent

Verfahren und Vorrichtung zur Temperaturmessung an zu beschichtenden Substraten

Verfahren und Vorrichtung zur Temperaturmessung an zu beschichtenden Substraten

by HEISIG, ANDREAS, MEYER, THOMAS
Year of Publication 25.06.2009

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Patent

Verfahren und Anordnung zum redundanten Anoden-Sputtern mit einer Dual-Anoden-Anordnung

Verfahren und Anordnung zum redundanten Anoden-Sputtern mit einer Dual-Anoden-Anordnung

by HEISIG, ANDREAS, MIRRING, ENNO, STRÜMPFEL, JOHANNES, TESCHNER, GÖTZ
Year of Publication 14.01.2016

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Patent

Vacuum coating system comprising a transport unit for transporting substrates

Vacuum coating system comprising a transport unit for transporting substrates

by STRUEMPFEL JOHANNES, HECHT HANSRISTIAN, BAUER REINHARDT, HUPKA FRANK, HEISIG ANDREAS, ERBKAMM WOLFGANG
Year of Publication 06.03.2012

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Patent

Vacuum coating system comprising a transport unit for transporting substrates

Vacuum coating system comprising a transport unit for transporting substrates

by Bauer, Reinhardt, Hupka, Frank, Heisig, Andreas, Struempfel, Johannes, Hecht, Hans-Christian, Erbkamm, Wolfgang
Year of Publication 06.03.2012

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Patent

Vakuumbeschichtungsanlage und Verfahren zur Beschichtung von Substraten

Vakuumbeschichtungsanlage und Verfahren zur Beschichtung von Substraten

by HEISIG, ANDREAS, GODER, REINHARD
Year of Publication 16.04.2009

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Patent

Heating device for a vacuum plant, comprises a heat-radiating surface, and a heat storage unit and/or heating element arranged parallel to the surface of the heat storage unit

Heating device for a vacuum plant, comprises a heat-radiating surface, and a heat storage unit and/or heating element arranged parallel to the surface of the heat storage unit

by HUPKA, FRANK, HEISIG, ANDREAS, BAUER, REINHARDT, PUENSCH, THOMAS, SMOLKE, MATTHIAS
Year of Publication 09.04.2009

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Patent

Transport device with a monitoring appliance and substrate treatment apparatus

Transport device with a monitoring appliance and substrate treatment apparatus

by STRUEMPFEL JOHANNES, BAUER REINHARDT, HUPKA FRANK, POSSECKARDT THOMAS, HEISIG ANDREAS, SMOLKE MATTHIAS
Year of Publication 06.12.2011

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Patent

Transport device with a monitoring appliance and substrate treatment apparatus

Transport device with a monitoring appliance and substrate treatment apparatus

by Bauer, Reinhardt, Struempfel, Johannes, Heisig, Andreas, Smolke, Matthias, Posseckardt, Thomas, Hupka, Frank
Year of Publication 06.12.2011

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Patent

Belichtungsanordnung und Verfahren zum Betreiben einer Belichtungsanordnung

Belichtungsanordnung und Verfahren zum Betreiben einer Belichtungsanordnung

by FUKAREK, WOLFGANG, HEISIG, ANDREAS, HAUFE, DIETRICH, WILLKOMMEN, UDO
Year of Publication 17.09.2015

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Patent

Gasentladungslampenanordnung

Gasentladungslampenanordnung

by GROSS, HARALD, HEISIG, ANDREAS, LEUPOLD, JAN, WILLKOMMEN, UDO
Year of Publication 17.09.2015

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Patent

GAS DISCHARGE LAMP ARRANGEMENT

GAS DISCHARGE LAMP ARRANGEMENT

by GROSS, HARALD, HEISIG, ANDREAS, LEUPOLD, JAN, WILLKOMMEN, UDO
Year of Publication 17.09.2015

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Patent