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Langereis, Erik, Bouman, Menno, Keijmel, Jeroen, Heil, Stephan, Van de Sanden, M. C., Kessels, W. M.
Published in ECS transactions (03.10.2008)
Published in ECS transactions (03.10.2008)
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Opportunities for Plasma-Assisted Atomic Layer Deposition
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Published in ECS transactions (18.07.2007)
Published in ECS transactions (18.07.2007)
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Published in ECS transactions (18.07.2007)
Published in ECS transactions (18.07.2007)
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Remote Plasma and Thermal ALD of Al2O3 for Trench Capacitor Applications
van Hemmen, Hans, Heil, Stephan, Klootwijk, Johan, Roozeboom, F., Hodson, Chris, van de Sanden, Richard, Kessels, Erwin
Published in ECS transactions (18.07.2007)
Published in ECS transactions (18.07.2007)
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Year of Publication 18.11.2020
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Year of Publication 18.11.2020
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Year of Publication 13.03.2018
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Year of Publication 29.09.2015
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de Keijser, Mark, Heil, Stephan, van der Schaar, Cecile, Broekman, Hans, Donkers, Johannes
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Year of Publication 07.06.2017
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Year of Publication 09.08.2016
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Year of Publication 25.06.2014
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Year of Publication 03.05.2016
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Semiconductor device comprising an active layer and a Schottky contact
DONKERS JOHANNES JOSEPHUS THEODORUS MARINUS, AAN DE STEGGE JOS, HEIL STEPHAN BASTIAAN SIMON
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Year of Publication 05.04.2016
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DELHOUGNE ROMAIN, BROEKMAN HANS, DONKERS JOHANNES THEODORUS MARINUS, HEIL STEPHAN
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Year of Publication 14.11.2013
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SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD
THEODORUS MARINUS DONKERS JOHANNES JOSEPHUS, SONSKY JAN, HEIL STEPHAN BASTIAAN SIMON
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Year of Publication 12.11.2015
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SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD
DONKERS JOHANNES JOSEPHUS THEODORUS MARINUS, AAN DE STEGGE JOS, HEIL STEPHAN BASTIAAN SIMON
Year of Publication 12.11.2015
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Year of Publication 12.11.2015
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HEIL, STEPHAN, BASTIAAN, SIMON, DONKERS, JOHANNES,JOSEPHUS, THEODORUS, MARINUS, SONSKY, JAN
Year of Publication 11.11.2015
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Year of Publication 11.11.2015
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Donkers, Johannes, Josephus, Theodorus, Marinus, Heil, Stephan, Bastiaan, Simon, Aan De Stegge, Jos
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Year of Publication 11.11.2015
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CROON JEROEN ANTOON, DONKERS JOHANNES JOSEPHUS THEODORUS MARINUS, SONSKY JAN, HURKX GODEFRIDUS ADRIANUS MARIA, HEIL STEPHAN BASTIAAN SIMON
Year of Publication 12.07.2016
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Year of Publication 12.07.2016
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